Flow Rate Calibration Setting - Hitachi CHROMASTER 5160 Instruction Manual

3.2.4 Flow Rate Calibration Setting

Pressing the purge key in the state of PUMP ON executes
purging at the set flow rate. Re-pressing the purge key during
purge will reset it. During purge, the upper pressure limit is set
at 2.9 MPa and the lower pressure limit at 0 MPa.
Set up a calibration coefficient for the flow rate.
Monitor screen
SET UP
UTLTY
UTLITY (CONDITION=1, UNIT=2,
1 EVENT=4, LINK=5, P.WASH=6, OTHERS=7)
Select CONDITION
1 ENT
CONDITION SET
4 PURGE=3,
Select CALIBRATION
4 ENT
CALIBRATION (FLOW=1,
1
Select FLOW
1 ENT
FLOW CALIB (0.970 – 1.030)
1.000
Enter calibration coefficient.
ENT
Monitor screen
3 - 21
FLUSH=3
(Z-ADJ=1, MOTOR-CTRL=2
CALIBRATION=4,
PRESS=2)
LPGR=5)