Honeywell Vertex M User Manual page 176

1
Gas Name TLV LAL
Silane XP4 (SiH )
4
5 ppm 50 ppb
Low Level
Sulfur Dioxide (SO ) 250 ppb 30 ppb
2
0.5 mg/
Tertiary Butyl Arsine
3
m as As 15 ppb
(TBA)
(OSHA)
0.5 mg/
Tertiary Butyl Arsine
3
m as As 15 ppb
XP (TBA)
(OSHA)
0.5 mg/
Tertiary Butyl Arsine
3
m as As 15 ppb
XP4 (TBA)
(OSHA)
Tertiary Butyl
None Est 80 ppb
Phosphine XP (TBP)
Tertiary Butyl
None Est. 80 ppb
Phosphine XP4 (TBP)
Tetrakis
Dimethylamino None Est. 0.1 ppm
Titanium XP (TDMAT)
Tetrakis
Dimethylamino
Not Est. 0.1 ppm
Titanium XP4
(TDMAT)
TLV - Threshold Limit Value LAL - Lowest Alarm Level
1. "-1" calibrations allow more stain development but will extend response times
2. Minimum Sample Time
Default Default
LDL Alarm Alarm Range
Level 1 Level 2
50 ppb 250 ppb 500 ppb 0-5000 ppb
25 ppb 250 ppb 500 ppb 0-2500 ppb
12 ppb 50 ppb 100 ppb 0-500 ppb
12 ppb 50 ppb 100 ppb 0-500 ppb
12 ppb 50 ppb 100 ppb 0-500 ppb
75 ppb 300 ppb 600 ppb 0-2000 ppb
75 ppb 300 ppb 600 ppb 0-2000 ppb
0.1 ppm 1.0 ppm 2.0 ppm 0-10.0 ppm
0.1 ppm 1.0 ppm 2.0 ppm 0-10.0 ppm
LDL - Lower Detectable Limit
Initial Ana-
Time to 1 TLV (Alarm @ 2 TLV Concentration 10-ft.
Alarm Setting lysis Period
(second)
50-249 ppb 360
250-499 ppb 240
<100 sec (Alarm @500 ppb with 1000 ppb SiH
500-999 ppb 120
1000-5000 ppb 60
30-249 ppb 60
<30 sec
250-2500 ppb 30
15-49 ppb 120
50-99 ppb 60
<42 sec
100-199 ppb 30
200-500 ppb 15
15-24 ppb 120
25-49 ppb 60
<45 sec (Alarm @ 50 ppb with 100 ppb TBA gas)
50-99 ppb 30
100-500 ppb 15
15-24 ppb 120
25-49 ppb 60
<45 sec (Alarm @ 50 ppb with 100 ppb TBA gas)
50-99 ppb 30
100-500 ppb 15
80-149 ppb 240
150-299 ppb 120
<70 sec (Alarm @300 ppb with 600 ppb TBP gas)
300-599 ppb 60
600-2000 ppb 30
80-149 ppb 240
150-299 ppb 120
<70 sec (Alarm @ 300 ppb with 600 ppb TBP gas)
300-599 ppb 60
600-2000 ppb 30
0.1-0.4 ppm 15
<20 sec
0.5-10.0 ppm 10
0.1-0.4 ppm 15
<20 sec
0.5-10.0 ppm 10
Chemcassette
Sample Line) Part Number
gas) 1257-9300
4
1295-0552
1295-0300
1295-0226
1257-9300
1295-0226
1257-9300
1295-0405
1257-9309