Chapter 1 Specifications; Semi Standards Compliance - Mitsubishi Electric MELSEC iQ-R Series User Manual

1
SPECIFICATIONS
This section shows the specifications of the SECS/GEM communication software.
1.1

SEMI Standards Compliance

The SECS/GEM communication software complies with the following SEMI standards.
: Compliant : Partially compliant : Not compliant
Standard Compliant
number version
E4 E4-0699
E5 E5-1106E
E37 E37-0303
E37.1 E37.1-0702

E37.2
E30 E30-0307N
*5
E82 E82-1106
*5
E88 E88-0307
*5

Draft 6263
*1 Standards of communication that uses RS-232C.
*2 Supported by Q12DCCPU-V edition only.
*3 Standards of communication that uses TCP/IP.
*4 Basic requirements of GEM are compliant.
*5 Subset of GEM E30.
For the details of specifications and terms of SEMI standards when using the SECS/GEM communication
software, check the SEMI standards.
Standard name
SEMI Equipment Communications Standard 1
*1
Message Transfer (SECS-)
SEMI Equipment Communications Standard 2
Message Content (SECS-)
High-Speed SECS Message Services (HSMS)
*3
Generic Services
High-Speed SECS Message Services Single
Selected-Session Mode (HSMS-SS or HSMS-SSS)
High-Speed SECS Message Services General
Session (HSMS-GS)
Generic Model for Communications and Control of
Manufacturing Equipment (GEM)
Specifications for Interbay/Intrabay AMHS SEM
(IBSEM)
Specifications for AMHS Storage SEM (Stocker
SEM)
PCB equipment communication interface (PCBECI)
SECS/GEM communication software compliance list
Q12DCCPU-V-/RD55UP06-V-/RD55UP12-V-
BZ11 BZ13
(Non-GEM (GEM version)
version)
*2 *2
 
 
 
*4
 
1.1 SEMI Standards Compliance
BZ15
(GEM advanced
version)
*2




1 SPECIFICATIONS
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