Honeywell VC4 User Manual page 123

Symbol
HF Hydrogen Fluoride
HF-LL Hydrogen Fluoride - Low Level
H Se Hydrogen Selenide
2
NO Nitrogen Dioxide
2
COCI Phosgene
2
COCI /-
2
Phosgene - High Range
HL
PH Phosphine
3
SiH Silane
4
SO Sulful Dioxide
2
Tetrakis Dimethylamino
TDMAT
Titanium
VC4™
Gas Name
123
Filter Type Filter Type
A B
X
X
X
X
X
X
Filter Type
C
X X
X X
X X
X X
User Manual