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6 6 H H a a r r d d w w a a r r e e O O v v e e r r v v i i e e w w
6.1 Machine Identification ..................................................................................................................36
6.2 Machine Overview .......................................................................................................................37
6.3 Frame .........................................................................................................................................37
6.3.1 Doors, Hatches And Shell ...................................................................................................37
6.3.1.1 Alarm Tower .............................................................................................................41
6.3.2 Pneumatic Supply System ..................................................................................................42
6.3.3 Internal Cooling System ......................................................................................................45
6.3.3.1 Pre-Pressure Manifold..............................................................................................45
6.3.3.2 Filter Assembly, Feed And Return Manifold.................................................................46
6.3.3.3 Connection Manifold And Heat Exchanger Assembly...................................................46
6.3.3.4 Heat Exchanger Assembly.........................................................................................47
6.3.3.5 Column Cooling Fan..................................................................................................47
6.4 Vacuum Chamber........................................................................................................................48
6.4.1 Chamber Door ...................................................................................................................48
6.4.2 Rake System .....................................................................................................................49
6.4.2.1 Rake Positions..........................................................................................................50
6.4.3 Z actuator ..........................................................................................................................51
6.4.4 Build Unit, Removable Parts................................................................................................52
6.4.5 Build Unit, Fixed Parts ........................................................................................................53
6.4.6 Door Closing Actuators .......................................................................................................53
6.5 Vacuum System ..........................................................................................................................54
6.5.1 Backing System .................................................................................................................54
6.5.2 Chamber System ...............................................................................................................54
6.5.3 Column System..................................................................................................................55
6.5.4 Inert Gas............................................................................................................................55
6.6 Electron Beam Unit ......................................................................................................................56
6.6.1 High Voltage Unit ...............................................................................................................56
6.6.2 Top Column .......................................................................................................................57
6.6.3 Lower Column....................................................................................................................58
6.6.4 Smoke Sensor ...................................................................................................................59
6.7 Control System ............................................................................................................................60
6.7.1 Computer...........................................................................................................................60
6.7.2 PLC...................................................................................................................................61
6.7.3 Electronic Racks ................................................................................................................62
6.7.4 ProfiBus System.................................................................................................................63
6.7.5 Power Supply.....................................................................................................................64
6.8 Camera System...........................................................................................................................65
6.8.1 LayerQam..........................................................................................................................65
6.8.2 Shutters.............................................................................................................................66
6.8.3 xQam ................................................................................................................................66
02
OM-710430
en-GB
35
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