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7 7 . . 1 1 . . 3 3 . . 7 7 . . 8 8 O O p p e e n n T T h h e e C C h h a a m m b b e e r r D D o o o o r r
1. Press M M e e n n u u .
2. Press H H a a r r d d w w a a r r e e .
3. Press V V e e n n t t i i l l a a t t e e .
4. Press H H e e l l i i u u m m if the temperature is above 80
degrees.
5. Press U U n n l l o o c c k k .
6. To be able to see the actual pressure inside the
chamber, press A A d d v v a a n n c c e e d d a a n n d d m m a a n n u u a a l l c c o o n n t t r r o o l l for
Vacuum
7. Wait until the backing pressure is 1.0 e3
(1000) mBar to open the chamber door.
02
OM-710430
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