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7 7 . . 1 1 . . 3 3 . . 9 9 M M a a n n u u a a l l B B e e a a m m A A l l i i g g n n m m e e n n t t
To be able to align the beam, the high voltage unit must be started.
A beam alignment is performed after a beam calibration or when the grid cup assembly (including the cath-
ode) is replaced. The beam can be aligned automatically or manually. It is recommended to let the machine
align the beam.
1. Press A A l l i i g g n n B B e e a a m m .
2. Press the F F o o c c u u s s A A l l i i g g n n m m e e n n t t tab.
3. Verify the focus and the step size values. Default
values are:
0.02
S S t t e e p p s s i i z z e e : :
+ + F F o o c c u u s s : :
50
- - F F o o c c u u s s : :
-50
4. Press + + to set the beam current to 0 0 . . 6 6 t t o o 1 1 . . 0 0 m m A A . If
needed the intensity of beam can be adjusted by
changing the beam current up or down.
5. Press S S t t a a r r t t to activate the beam. The focus offset
value now varies between + + 5 5 0 0 m m A A a a n n d d - - 5 5 0 0 m m A A . .
6. Wait for the indicator to turn green.
128
02
OM-710430
en-GB
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