Unit Overview Display ....................................................................................................78
Unit Detail Display..........................................................................................................80
Sequence Detail Display..................................................................................................84
Sequence Debug Display.................................................................................................91
Recipe Detail ...................................................................................................................97
TCL Array Plot Display ..................................................................................................98
Segment Display............................................................................................................103
Register Display ............................................................................................................108
3BUR002418-600 A
SFC Display Format.............................................................................................87
SFC Display Operation ........................................................................................88
Sequence Source ..................................................................................................92
Changing Recipe Values ......................................................................................98
TCL Array Plot Format ........................................................................................98
Using TCL Array Plot ..........................................................................................98
Table of Contents
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