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7 7 . . 6 6 . . 1 1 0 0 C C h h e e c c k k T T h h e e C C i i r r c c u u i i t t F F l l o o w w s s
1. Check the flow of the circuits:
• Chamber cabinet heat exchanger circuit: 2 2 . . 5 5 l l / /
m m i i n n (1.0 to 3.5)
• Control cabinet heat exchanger circuit: 2 2 . . 5 5 l l / / m m i i n n
(1.0 to 3.5)
• Turbo pumps circuit: 1 1 . . 5 5 l l / / m m i i n n (0.6 to 2.4)
• Z-actuator feedthrough circuit: 1 1 . . 0 0 t t o o 1 1 . . 5 5 l l / / m m i i n n
2. If necessary, adjust the flow.
3. Check and adjust the column circuit flow switch to
trigger the alarm at a flow less than 0 0 . . 5 5 l l / / m m i i n n .
4. Turn off the cooling media supply with the shut-off
valve (1) while monitoring the internal shuttle (2) in
the flow switch. The position (3) of the switch can
be moved to adjust the switch point.
5. Verify that a warning appears in EBM control when
the flow is too low.
80
1. Turbo pump circuit
2. Z-actuator circuit
3. Heat exchanger circuits
1. Shut-off valve
2. Internal shuttle
3. Switch position
01
IM-710429
en-GB
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