Positional Deviation Measurement
Numeric calculation setting
- Press the TRG/BRT key to move the cursor to the upper function menu, and highlight "COND" using
the left and right arrow keys. Press the SET key to show the popup menu. Select "NUM-CALC" from
the popup menu.
- Select "NUM-CALC" on the menu tree.
See "Chapter 14: Numerical calculations."
Output condition setting
- Press the TRG/BRT key to move the cursor to the upper function menu, and highlight "COND" using
the left and right arrow keys. Press the SET key to display the popup menu. Select "OUT" from the
4
popup menu.
- Select "OUT-COND" on the menu tree.
See "Chapter 16: Setting the Input/Output Conditions.
Display the measurement results
Return to the operation screen and press the TRG/BRT key. The measurement results will be dis-
played on the screen.
For display examples of measurement results using other modes, see the next page.
Registration number
Detection coordinates in the
reference image for model 0
Amount of deviation from the
reference image for model 0
Degree of match with the
reference image for model 0
Amount of angular deviation
Detection coordinates in the
reference image for model 1
Amount of deviation from the
reference image for model 1
Degree of match with the
reference image for model 1
1P-SCH+1P-EDGE
(TYPE00)
OK
MEAS XXXXms
MEASURE 0 CAM1 POSI-DEVIATION
REGISTER NO(0~7)
X0=176.0 OK
Y0=322.0 OK
x0=+000.0 OK
y0=+000.0 OK
M0=+10000 OK
B0=+001.7 OK
X1=534.0 OK
Y1=480.0 OK
x1=+001.0 OK
y1=+001.0 OK
K1=1
X0~6
Y0~7
MNU-CHG MAIN-COND CHG-MEA COND-CHG CHNG-REG SCREEN-CHG CHG-TYPE
4-10
F C1 BRT
V*.**
READY