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9. Bellows
The bellows are provided in a unit of two pieces. The shape varies between the upper
NOTE
and lower bellows.
A large amount of dust is emitted when replacing the bellows.
Take the Manipulator to an outer room such as the room in front of the clean room's
entrance, or take the necessary countermeasures to prevent dust emission before removing
the bellows.
Maintenance
Bellows
parts
Tools
Cross-point screwdriver
Bellows
(1) Remove the end effector.
Removal
(2) Remove the wires and tubes from the end effector.
(3) Turn ON the controller. Stop motor excitation. (MOTOR OFF)
(4) Loosen the two clamp bands on each bellows.
(5) Pull the bellows, rubber sheet, and clamp
G10 / G20 Rev.20
Name
bands out of the shaft.
(The rubber sheet is not used for the upper
bellows.)
Quantity
150 mm
R13B030701
1
390 mm
R13B030703
1
For clamp band removal
Clamp band (small)
Maintenance 9. Bellows
Note
Bellows
Clamp band (medium)
without rubber sheet
Clamp band (large)
Clamp band (small)
191
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