Honeywell Midas-M User Manual page 96

Cell ID & Gas ID
Cell ID
0 N/A
1 H2
2 SiH4
3 Cl2
4 NH3 Low
5 NH3 High
6 HBr
7 HCl
8 CO
9 PH3
10 BCl3
11 HF High
12 TEOS
13 B2H6
14 ClF3
15 BF3
16 WF6
17 O3
18 GeH4
19 CH4
20 AsH3
21 F2
22 SiF4
23 O2
24 Si2H6
25 SO2
26 CO2
27 SiH2Cl2
28 NO
29 N2O
30 NO2
31 Br2
32 H2S High
33 H2S Low
Midas-M
Gas ID
0 N/A
1 H2
2 SiH4
3 Cl2
4 NH3
5 HBr
6 HCl
7 CO
8 PH3
9 BCl3
10 HF
11 TEOS
12 B2H6
13 ClF3
14 BF3
15 WF6
16 O3
17 GeH4
18 CH4
19 AsH3
20 F2
21 SiF4
22 O2
23 Si2H6
24 SO2
25 CO2
26 SiH2Cl2
27 NO
28 N2O
29 NO2
30 Br2
31 H2S
32 POCl3
33 3MS
96 User Manual