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Range Resolution
Gas Name
Formula
Fluoride
ppm
Boron
0 - 8
BF3
0.05 ppm
Trifluoride
ppm
Tungsten
0 - 12
WF6
0.05 ppm
Hexafluoride
ppm
1
Recommended to keep the sample lines as short as possible where the RH condition at the sample point is high (above %50 RH); there will be some sample loss due to absorption onto the
sample line.
2
An ozone generator can be used instead of 1 ppm NO2.
Bump Testing Notes:
As an alternative, the actual target gas can always be used instead of a cross-sensitive gas.
Higher concentrations than the recommended ones can be used if necessary, but extra time may be needed for the reading to recover to zero.
IMPORTANT: this should only be done once to avoid the danger of poisoning the sensor.
Maximum
Sensor
Default
Default
Sensor
Part
Alarm
Alarm
Warm-up
Number
1
2
Time(minutes)
ppm
Z2
MMS-
1 ppm
2 ppm
20
Z2
1.5
MMS-
3 ppm
20
ppm
Z2
Calibration
Flow
Rate
Output
Exp
(cc/min)
Calibration
Conc.
Equiv.
Time
Gas
(ppm)
(sec)
600
HF
4
5.2
300
600
HF
6
6
300
Bump Test
Recommended
Maximum
Recommended
Conc
Max
Sample Line
Bump Test
(ppm)
Time
Length(m)
Gas
(sec)
1
Cl2
5
180
5
1
Cl2
10
180
5
End of line filter
1830-0055
1991-0147 or
1830-0055
1991-0147 or
1830-0055
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