Hitachi TM3030 Plus Instruction Manual page 382

Tabletop microscope
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4. Rv (Maximum Profile Valley Depth)
Distance from the centerline to the largest valley
5. Rp (Maximum Profile Peak Height)
Distance from the centerline to the highest peak
6. Rms (Root Mean Square)
The square of the deviation from the centerline to the roughness curve
integrated over 1 segment of the measured length, and the square root is taken of the
average over the segment:
1
l
 
Rms
f x dx
l
0
7. Ra (Roughness Average)
Arithmetic average of absolute values
1
l
Ra
f x dx
( )
l
0
8. Rz (Maximum Height of the Profile)
Distance from the highest peak to the deepest valley
Rv
2
Appendix - 2
Rp
f x ( )
is

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