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To Avoid Serious Property Damage or Damage to the System
About Turbo Molecular Pump
This instrument has a built-in Turbo Molecular Pump (TMP) whose fan rotor spins rapidly
(90,000 rpm) to maintain a vacuum inside the specimen chamber. So, any excessive shock
might damage TMP. For proper use, follow the precautions below.
(1)
Filament replacement
Do not apply any shock to the electron gun part when opening/closing the electron
gun and performing beam axis alignment, which are needed in association with
filament replacement process.
(2)
Specimen exchange
Carefully draw out/insert the specimen stage to avoid any impact to the instrument.
(3)
Relocation of the instrument
Because this is a precision instrument and TMP should be fixed securely before
relocation, be sure to contact our service department when relocation is needed for
any reason. (As a rule, the customer is not allowed to relocate the instrument.)
Any malfunction might occur in TMP if excessive shock is applied to the instrument
without TMP secured.
(4)
Handling of installation table
Do not apply excessive vibration or external shock to the table where the instrument is
placed.
Be careful not to apply any vibration to the table especially when doing some work on
it.
About Power Outages
An instantaneous voltage sag caused by a power outage or lightening can potentially damage
the basic software, the application software, or data. As a countermeasure against
instantaneous voltage sag, the use of the system with a PC battery mounted is recommended.
If a power outage occurs, turn off the earth leakage breaker and the power switch to guard
against voltage surges that can occur when power is restored.
When power is restored, the system returns to the condition that existed before the power
outage. If the power outage occurred in the midst of evacuation, the system automatically
resumes evacuation. If the system was open to the atmosphere, that condition is
maintained as is.
For the Safe Handling of the System
(continued)
NOTICE
SAFETY - 10
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