Spare Parts - Hitachi TM3030 Plus Instruction Manual

6.3 Spare Parts

The spare parts shown below must be obtained when the system is operated for a long time.
The number of spare parts you need to stock varies depending on your intended use. (See
Table 6.3.)
Part No.
J821153 Fuse
J821154 Fuse
J821156 Fuse
J821157 Fuse
J821158 Fuse
J821159 Fuse
J821591 Alarm Fuse
J821594 Alarm Fuse
J821055 Fuse
55E-1392 Specimen stage
55E-1682 Specimen stage
L456819 O-ring
L456111 O-ring
L456850 O-ring
L456824 O-ring
Table 6.3 Spare Parts
Name
For maintenance (0.3 A)
For maintenance (0.5 A)
For maintenance (1.6 A)
For maintenance (2 A)
For maintenance (3.2 A)
For maintenance (5 A)
For maintenance (2 A)
For maintenance (5 A)
For maintenance (6.3 A)
 70 mm
 30 mm
For electron gun
For inner pipe
For specimen chamber port (front)
For specimen chamber port (side)
6 - 4
Remarks
Quantity
Used
2
2
2
2
2
2
2
2
2
－
－
1
1
1
1