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5 5 . . 8 8 . . 2 2 H H a a n n d d l l i i n n g g C C o o l l u u m m n n P P a a r r t t s s
C C a a u u t t i i o o n n
All handling of the top column should be done by lifting it using the knobs located on the sides of
the top, this to avoid contaminating sensitive part and avoiding body injuries.
C C a a u u t t i i o o n n
Part of the top column is made from ceramic filled with isolating oil, therefore it is very important
that the top column is handled carefully.
C C a a u u t t i i o o n n
All work done with the EB-Unit parts, including grid cup and cathode, calls for highest possible
cleanliness.
Do N N O O T T touch parts with bare hands. Use a separate set of tools for the column.
All surfaces where parts and tools are placed have to be wiped with alcohol prior to work.
Always begin with cleaning of the column, to avoid bringing the chamber contamination into the column.
During normal maintenance and handling procedures, do not use solvent in the column assembly, use as
little solvent as possible in exceptional circumstances.
C C o o n n t t a a m m i i n n a a t t i i o o n n i i n n t t h h e e c c o o l l u u m m n n m m i i g g h h t t l l e e a a d d t t o o : :
• Beam control errors
• Prolonged pumping times
• Increased risk of arc trips
• Interrupted builds
• Shortened life time of the cathode
02
OM-710430
en-GB
Access the electron beam unit via the column hatch.
33
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