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7 7 . . 1 1 . . 3 3 . . 3 3 . . 2 2 P P e e r r f f o o r r m m A A S S y y s s t t e e m m O O u u t t g g a a s s s s i i n n g g
To eliminate contamination (such as fingerprints and vacuum grease) and moisture from the chamber, a
system outgassing is performed every time interior has been replaced or vacuum grease has been applied.
Change of heat shields and foil does not require an outgassing. This procedure takes about 1 1 0 0 h h o o u u r r s s .
If to perform a system outgassing with powder in the hoppers, to protect the powder from contamination.
Vacuum clean the chamber from powder before the system outgassing.
The system outgassing steps are defined in the start plate theme.
N N o o t t e e
The start plate and cathode used during a system outgassing will be destroyed. It is therefore
recommended to use an old start plate and cathode during the outgassing.
1. Fit a start plate.
2. Fit all chamber interior.
3. Install a heat shield.
4. Close the chamber door.
5. Press M M e e n n u u .
6. Press the B B u u i i l l d d tab.
7. Press P P r r o o j j e e c c t t .
8. Select S S y y s s t t e e m m O O u u t t g g a a s s s s i i n n g g .
9. Press the G G r r e e e e n n t t i i c c k k to approve the selection.
10. Press the H H a a r r d d w w a a r r e e tab.
11. Press S S t t a a r r t t to enable the vacuum sequence.
N N o o t t e e
Once a valid vacuum level has been obtained the power supply start button will be enabled.
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