Figure Title - HP 5501A Operating And Service Manual

LIST O F FIGURES (Continued)
Figure Title
Page
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10704A Retroreflector Specifications 2-18
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10706A Plane Mirror Interferometer Specifications 2-19
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10710A and 10711A Adjustable Mounts Specifications 2-20
Horizontal and Vertical Plane Mounting Using the
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10710A Adjustable Mount 2-21
2-26 Horizontal Plane Mounting Using the 10711A Adjustable Mount
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2-23
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2-27 Vertical Plane Mounting Using the 10711A Adjustable Mount 2-23
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2-28 10780A Receiver Dimensions 2-24
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2-29 Deadpath Error Compensation 2-26
2-30 Relative Effect of Errors in Atmospheric and Material
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Temperature Factors 2-27
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2-31 Cosine Error 2-30
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2-32 Three-Axis Configuration 2-31
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2-33 Four-Axis Configuration 2-32
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2-34 Two-Axis Plane Mirror Interferometer Configuration 2-33
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2-35 X-Y Stage Installed in a Vacuum Chamber 2-33
2-36 Two-Axis Measurement System with Unequal Measurement Paths
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2-34
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2-37 Three-Axis Machine Tool Installation 2-36
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2-38 Three-Axis Measuring Machine Installation 2-37
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2-39 Laser Head Installation 2-38
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2-40 Y-Axis Installation 2-38
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2-41 X-Axis Installation 2-39
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2-42 Abbe Offset Error 2-40
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2-43 Positioning of Measurement Axis to Minimize Abbe Error 2-41
2-44 X-Y Stage Measurement with 10706A Plane Mirror l nterferometer
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2-42
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2-45 X-Y Stage Geometric Errors 2-42
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2-46 Installation of Optics for Minimum Deadpath 2-43
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2-47 Protective Covers for Optics and Laser Beam 2-45
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2-48 Collapsible Spiral Cover for Movable Retroreflector 2-46
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2-49 Optimum Alignment 2-47
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2-50 Effect of Optics Measurement 2-48
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2-51 Effects of Angular Misalignment to the Direction of Travel 2-48
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2-52 Alignment Tips 2-50
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2-53 Visual Alignment 2-52
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2-54 Autoreflection Alignment 2-54
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2-55 Plane Mirror Interferometer Alignment 2-57
\
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Simplified Block Diagram 3-2
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Calculator Interface Electronics Block Diagram
3-3
Counter-Based Computer Interface Electronics Block Diagram
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3-5
Comparator-Based (Closed-Loop) System Simplified Block Diagram
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3-7
Comparator-Based Computer Interface Electronics Block Diagram
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3-8
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English/Metric Pulse Output Electronics Block Diagram 3-11
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10781A Pulse Converter Electronics Block Diagram 3-13
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5501A Laser Transducer Block Diagram 3-14
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10780A Receiver Block Diagram 3-15
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10740A Coupler Backplane Signals 3-16
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10745A HP-I B l nterface Block Diagram 3-18
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10746A Binary Interface Block Diagram
3-20
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10760A Counter Block Diagram 3-21
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1076214 Comparator Block Diagram 3-23
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10764A Fast Pulse Converter Block Diagram 3-24
vii