Testing Each Instrument; Testing Emergency O Unit And Power Distribution Unit (Pdu) - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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Testing Each Instrument

After installing all the system instruments, inspect each instrument before applying power.
Complete the following procedure and refer to the
If any failures are detected, see the HP 4062C/UX
Supplement for Service Manual
Testing Emergency Off Unit and Power Distribution Unit (PDU)
If your system is not furnished with an emergency o unit, skip this test.
This test checks the following items:
Operation of the ground-fault circuit interrupter (GFCI)
Operation of BREAKER ON indicator
Operation of LINE switches
Operation of EMERGENCY OFF switch
Operation of Ext In terminals
Operation of Ext Out 1 and 2 terminals
Use the following procedure to check the test items above:
1. Con rm the main circuit breaker or GFCI in the system cabinet and the line switches of
all the system instruments are set to OFF. The main circuit breaker or GFCI is located
at the bottom of the rear panel. See the
location of each line switch.
2. Connect the main power cable to the power source at your site.
3. Turn on the main circuit breaker or GFCI in the system cabinet.
4. If your PDU is furnished with a GFCI, press the red push switch labeled \Breaker Test
Switch" to force earth leakage current. The GFCI indicator should extend out to show the
earth leakage condition.
To reset the GFCI indicator, use the following procedure:
a. Move the switch lever to OFF. The GFCI indicator should retract.
b. Move the switch lever to ON.
5. Turn on the circuit breaker for the emergency o unit. The \BREAKER ON" indicator
(white) should turn on.
6. Turn on and o one of the system instruments. Note that the selected instrument must
originally function properly. The instrument should not turn on.
7. Press the LINE
8. Turn on one of the system instruments. Note that the selected instrument must originally
function properly. The instrument should turn on.
9. Check conductivity of the Ext Out 1 and 2 terminals by using a resistance meter. The
resistance between the Ext Out 1 terminals should be near 0 , and the resistance
between the Ext Out 2 terminals should indicate in nity.
4-44 System Installation
, or the
Service Manual
switch. The LINE \1" indicator (green) should turn on.
4 1 5
Operation Manual
Service Manual
of the instrument that failed.
of each instrument for the
Operation Manual
of the each instrument.
, the HP 4062F
Manual

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