Verifying The System Con Guration With Start.f Program - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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System Configuration Verification for HP 4062F
The rst step in verifying correct system operation is to check the con guration of the HP
4062F system instruments. To do so, perform the START.F program included in the system
software. Use the following procedures to run the START.F program.
Verifying the System Configuration with START.F Program
Con rm the system con guration with the con guration page of START.F. Use the following
procedures to perform the START.F program. If problems occur, go to Appendix C.
1. Turn the system instruments on.
2. Turn the controller system on and start the HP-UX system.
3. Log in as a superuser.
4. Start HP BASIC/UX as follows:
# rmb
5. Load and run the START.F program as follows:
LOAD "/usr/pcs/bin/START.F"
RUN
4 Return 5
The copyright message page is displayed.
6. START.F is performed, then the con guration page is displayed. An example of the
con guration page is shown in the Figure 6-3. Con rm that your system con guration is
correct.
d
***************** SYSTEM CONFIGURATION *****************|*** AVAILABLE PINS ****
4084B/4085F SWITCHING MATRIX:
4142B DC SOURCE/MONITOR (Rev. 4.10):
4280A 1MHz C METER/C-V PLOTTER:
4284A 20Hz-1MHz LCR METER (Opt. 001/006):
8110A 150MHz PULSE GENERATOR (1,2,3):
ELECTROGLAS 2001/2010/3001X WAFER PROBER:
****************** DCS CONFIGURATION *******************|
SLOT1:41421B(SMU1)
SLOT2:
SLOT3:41420A(SMU2)
SLOT4:41421B(SMU3)
********** HIGH FREQUENCY PORT CONFIGURATION ***********|
HF1: PG11 2: PG12 3: PG21
HF7:
************* AUXILIARY PORT CONFIGURATION *************|
AUX2:VS1
System date & time: 25 Apr 1994 18:36:46
"START" end.
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EDIT
c
6-4 System Verification
4 Return 5
SLOT5:41421B(SMU4)
SLOT6:41424A(AUX2)
SLOT7:
SLOT8:41425A
4: PG22 5: PG31 6: PG32 |
8:
9:
10:
11:
AUX3:
AUX4:
---------- Press [SHIFT] [MENU] for more keys.
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Continue
RUN
SCRATCH
Figure 6-3. Example of Configuration Page
or select the
NNNNNNNNNNN
RUN
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12:
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User 1
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LOAD ""
RE-STORE
Delete
""
TIS
softkey
a
Idle
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Link
TIS
b

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