4062F Dc W/O Dvm" Test; Required Equipment - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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\4062F DC W/O DVM" Test

The 4062F DC W/O (without) DVM test provides the following ten subtests for verifying
SWM, DCS, and CMU or CMU84 operation.
Relay Test
SMU Test
VS Test
VM Test
AFU Test
CMS C-G Test or CMU84 C-G Test
CMS Bias Test or CMU84 Bias Test
DC leak Test
The 4062F DC W/O DVM test provides two test modes: sequential and individual. In the
sequential test mode, this test performs all subtests in the sequence listed above. In the
individual test mode, tests can be performed individually in any desired sequence. For both
test modes, the program displays a running record of test results.
To verify HP 4062F after installation, you must execute
save the test results in a le for future reference.
So, this section provides instructions for performing all subtests of 4062F DC W/O DVM in
the
sequential test mode
procedures, refer to the HP 4062C/UX

Required Equipment

Relay test adapter
Relay test shorting adapter
System calibration module
Test xture adapter
only. For details about each test and for system troubleshooting
Service Manual
these subtests sequentially, and
all
.
System Verification 6-27

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