Honeywell Midas User Manual page 156

Gas Name Formula Range
Silane SiH 0-20 ppm 2.4 ppm
4
Silane Low Level SiH 0-2 ppm 0.24 ppm
4
Sulfur Dioxide SO 0-8 ppm 0.95 ppm
2
TEOS TEOS 0-40 ppm 4.8 ppm
Tungsten
WF 0-12 ppm 1.45 ppm
Hexafluoride
6
Tungsten
Hexafluoride WF 0-2 ppm 0.24 ppm
6
Low Range
Tungsten
Hexafluoride Low WF 0-2 ppm 0.24 ppm
6
Level
Lower
Default Default Sensor Part
Alarm
Alarm 1 Alarm 2 Number
Limit
2.5 ppm 5 ppm MIDAS-S/E-SHX
0.25 ppm 0.50 ppm MIDAS-S/E-SHL
1 ppm 2 ppm MIDAS-S/E-SO2
5 ppm 10 ppm MIDAS-S/E-TEO
1.5 ppm 3 ppm MIDAS-S/E-HFX
0.25 ppm 0.5 ppm MIDAS-E-HFU
0.25 ppm 0.5 ppm MIDAS-S/E-HFL
Maximum Flow
Sensor
Sensor Gas Rate
Cartridge
Calibration
Warm-up Time ID (cc/
ID
Gas
(minutes) min)
20 05 1 500 SiH
4
20 06 1 500 SiH
4
10 23 1 500 SO
2
10 24 1 500 ETO
20 08 4 500 HF
20 32 3 500 HF
20 26 3 500 HF
B-7
Midas
Calibration Bump Test
Output Exp Recommended
Conc Conc
Equiv. Time Bump Test
(ppm) (ppm)
(ppm) (sec) Gas
10 10 300 H S 50
2
1 1 300 H S 3
2
4 4 300 SO 4
2
20 20 300 ETO 25
5 5 300 Cl 10
2
1 1 300 Cl 1
2
1 1 300 Cl 1
2
Gas Detector
®
Recommended
Maximum End of Lne
Max
Sample Line Filter
Time
Length (m)
(sec)
780248,
180 30 1991-0147
or 1830-0055
780248,
1991-0147
180 30
or
1830-0055
1991-0147
180 30 or
1830-0055
780248,
1991-0147
180 30
or
1830-0055
1991-0147
180 5 4 or
1830-0055
1991-0147
180 5 or
1830-0055
1991-0147
180 5 or
4
1830-0055