Honeywell Midas User Manual page 152

Gas Name Formula Range
Carbon Monoxide CO 0-100 ppm 12 ppm
Chlorine Cl 0-2 ppm 0.24 ppm
2
Chlorine Dioxide ClO 0-0.4 ppm 0.048 ppm
2
Diborane B H 0-400 ppb
2 6
Dichlorosilane SiH Cl 0-8 ppm 0.95 ppm
2 2
Dichlorosilane
SiCl 0-15 ppm
H
High Range
2 2
Difluoromethane CH F 0-120 ppm
2 2
Disilane Si H 0-20 ppm 2.4 ppm
2 6
Ethylene C H 0-100% LEL 4.5% LEL
2 4
Fluorine F 0-4 ppm 0.48 ppm
2
Germane GeH 0-800 ppb
4
Hexafluorobutadiene C F 0-40 ppm 4.0 ppm
4 6
Lower
Default Default Sensor Part
Alarm
Alarm 1 Alarm 2 Number
Limit
12.5 ppm 25 ppm MIDAS-S/E-COX
0.25 ppm 0.50 ppm MIDAS-S/E-HAL
0.05 ppm 0.1 ppm MIDAS-S/E-BR2
48 ppb 50 ppb 100 ppb MIDAS-S/E-B2H
1 ppm 2 ppm MIDAS-S/E-HCL
5 ppm 5 ppm 10 ppm MIDAS-E-HCH
8 ppm 15 ppm 30 ppm MIDAS-S/E-XCF
2.5 ppm 5 ppm MIDAS-S/E-SHX
10% LEL 20% LEL MIDAS-S/E-LEL
0.50 ppm 1 ppm MIDAS-S/E-HAL
95 ppb 100 ppb 200 ppb MIDAS-S/E-ASH
5 ppm 10 ppm MIDAS-S/E-XCF
Maximum Flow
Sensor
Sensor Gas Rate
Cartridge
Calibration
Warm-up Time ID (cc/
ID
Gas
(minutes) min)
10 15 1 500 CO
10 12 1 500 Cl
2
20 13 2 500 Cl
2
20 33 1 500 B2H6
3
20 10 3 500 HCl
3
20 30 2 500 HCl
20 35 3 500 HF
3 2
20 05 2 500 SiH
4
H
2
30 25 5 500
C H
2 4
10 12 2 500 Cl
2
20 02 2 500 AsH
3
20 3 35 1 500 HF 2
B-3
Midas
Calibration Bump Test
Output Exp Recommended
Conc Conc
Equiv. Time Bump Test
(ppm) (ppm)
(ppm) (sec) Gas
50 50 300 CO 50
1 1 300 Cl 1
2
0.2 0.27 300 Cl 0.2
2
0.2 0.2 300 PH 0.3
3
4 4 300 HCl 4-6
10 10 300 HCl 10
5 40 300 Cl 5
2
2
10 11.3 300 H S 50
2
2 vol% 60 %LEL 300 H 2 vol%
2
1.35 vol% 50 %LEL 300 C H 1.35 vol%
2 4
2 2 300 Cl 2
2
0.1 0.54 300 PH 0.1
3
5 10.38 300 Cl 2 5
2
Gas Detector
®
Recommended
Maximum End of Lne
Max
Sample Line Filter
Time
Length (m)
(sec)
780248,
1991-0147
180 30
or
1830-0055
1991-0147
or
180 10
1830-0055
1991-0147
180 10 or
1830-0055
780248 2,
1991-0147
180 30
or
1830-0055
1991-0147
180 5 or
4
1830-0055
1991-0147
or
180 5
1830-
0055"
780248 2 ,
1991-0147
180 30
or
1830-0055
780248,
180 10 1991-0147
or 1830-0055
780248,
180 30
1991-0147 or
180 30
1830-0055
1991-0147
180 10 or
1830-0055
780248,
1991-0147
180 30
or
1830-0055
780248 ,
2
1991-0147
180 30
or
1830-0055