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Omega MASS FLOW FMA-1900 User Manual

Mass flow meter
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FMA-1900
Mass
Flow Meter
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Summary of Contents for Omega MASS FLOW FMA-1900

  • Page 1 .bemxa~eahnk@m_ Mtg:/~.umega.com e-mail: info@omega.com FMA-1900 Mass Flow Meter...
  • Page 2 Directives. OMEGA will add the CE mark to every appropriate device upon certification. The information contained in this document is believed to be correct but OMEGA Engineering, Inc. accepts no liability for any errors it contains, and reserves the right to alter specifications without notice.
  • Page 3 sona soeve . The . Th itti 1900 gauge ° 1900 1900 supp supp t li eaned ende ’ t doe connec 1900 essu shou ”C espec , pa 1900 ’ anua 248310898 f Om ’ hough oxyge t exce spec essu...

  • Page 4: Table Of Contents

    FMA-1900 SERIES FLOW CONTROLLERS TABLE 1 Introduction Description.. Specifications Installation Receipt FMA-1900 Shipment.. Return Before Mechanical Connections Plumbing Electrical Connections Operation Referencing Pressure Conditions Accuracy Overranging Output Zero Local Setpoint Position Mounting Output Setpoint Input Setpoint Configuratio Cold 3.10 3.11 CONT Beginn 4-20...
  • Page 5 FMA-1900 SERIES FLOW CONTROLLERS CONTENT TABLE Operation 3.12 3.13 Purging 3.13.1 Appendix Appendix Appendix On/Off Gases ... Purging .,...

  • Page 6: Introduction

    INTROD Description Omega’ s measure ranges O-50 (SCCM) standard +1.5% range, point. applications instrument Figure I- 1 The FMA- 1900 Flow Controller from full scale FMA-1900 ZERO SET POINT lite...

  • Page 7: Specifications

    flow external signals, “D” connector point rations fittings, l&Specificat FLOW fied “C (70°F). SCFH nm3/h). FMA-1900 (0.35-3.5 kg/cm*) differential optimum. GASES: dioxide, wetted OUTPUT load maximum CONTROL INPUT SLM/15 flO% versatile rate FMA-190 output provided 15-pin control. with RATES kg/cm* materia resistanc into...
  • Page 8 ACCURACY fl.5% O-100% REPEATABILIW &0.25% scale. full TEMPERATUR COEFFICIEN 0.08% PRESSURE kg/cm*), better: RESPONSE kg/cm*) kg/cm*) gauge LEAK lo- ‘ ATM cc/set outside (Not shutoff valve.) GASANDAMBI WEllED MATERIALS: Nyton 430F SETPOINT COMMAND optional) Ohms full scale full “C, bette PRESSU gauge (1.4...

  • Page 9: Installation

    INSTAL Receipt After packing packing their should detailed Remove carton accessories case Have Return obtainable number Information accomplishe which must NOTE: Equipment pletely found” identify receiving carton liability. contain (800~US shorta your return show work includ operatio billing case possib...

  • Page 10: Before

    Before Read actual Using erly flow quality avoid psig kg/cm* gauge) operating Apply Omega supply power specific Upon level flow) ration). CAUTION: The After monitoring Output control flow mass tag. 2.6, ELECTRICA monitoring output tag; signal, installat orient l/4-inch line.
  • Page 11 Integral digit engineering scale will show Overrange output After take resume ments operated cannot regulated peak, VDC. reduced between flow controllers flow SLM, controllers 160mA, Jumper installed) 250mA, Jumper removed) [ 15 regulated should Refer location Display range decimal going over several norm...

  • Page 12: Mechanical

    Mechanical CAUTION: which kg/cm* gauge) order tubing your clean period high-efficiency FMA-1900. temperature significant connectors transducer results calibrated mance CAUTION: inside Instead, Mount tapping CAUTION: furtherthan .15” (4mm). flow Figure 2- 1 Mounting the FMA- 7900 Series BSELFTAF$ ‘ INGTYPE 2.75 your psig...

  • Page 13: Plumbing Connections

    Plumbing Your (standard) should cleaned requires should only CAUTION: fittings l/4-inch fittings, Scribe While tighten mark o’ clock snugging damaging the inlet fitting. Finally, before CAUTION: check detectors Instead, IMPORTANT Install length recommended tubing downstream Failure impaired lers. upstream FMA-190 outlet fittings.

  • Page 14: Electrical Connections

    TABLE (Under Standard Conditions of 39 Flow Relative O-10 O-500 O-10 O-30 CAUTION: FMA-1900 theFMA-1900 “D” connector ments output PSIG Inlet and Ambient Outlet) Valve Ranges (Typical-in 0.02 O-500 0.03 0.05 0.05 0.065 0.083 O-50 Electrica output apply 15-pin “D” connecto side “D”...
  • Page 15 Figure 2-2 “D” Connector Location and Pin Number Assignments TABLE 2-2 “D” CONNECTOR PIN ASSIGNMENTS FUNCTION 9 4-20 SignalCommon valve Return PowerCommo Connection Setpoint Input NOTE: *O-l (Comm Signal Valveoff VDC) Suppty 4-20 Output ChassisG operat page Flow...

  • Page 16: Operation

    OPERA Temperatu “ standard” 21.1 (one order. FMA-1900, comparing meter. approximately “ standard” Accuracy effective &1.5% accurate kO.075 VDC) This kO.075 respect 1.5% tag. accurate +0.15 high specification. Referenc “C (70°F) and 760 mm atmosphe sure your 0°C rather .l” C. 51.5% accuracy full...

  • Page 17: The Ma

    Overrangin 1900 higher overranged overrange outputs more. four digits display. Overrange conditions going level, condition overrange Output mAoutput signal “D” connector mum) Figure Figure 1 Hookup Wiring for a Single 4-20 flow FMA- data value. 4-20 digits “1’ will will andlor output above...

  • Page 18: Output

    Zero Setpoint setpoint ports fl.5% more ometer reached flow setpoint potentiome using wise Mounting Unless brated (k15”) with position NOTE: when Output linearly O-100% resistance dates Setpoint Input setpoint input O-100% causes causes When controller second full Either scale. setpoint commands Adjustm potentiomet...
  • Page 19 Figure 3-2 Component Location and L- j r-- ’ I ___ i--i D/P Switch Set Up...

  • Page 20: Setpoint Configuratio

    Setpoint Configura configure setpoint operation on-board setpoint command Other setpoint with sourced setpoint with factory Move 1 to setpoint potentiometer external required Move input. your decide setpoint VR12 setpoint ensure Move (auto setpoint Move command headroom reach intended 0-1OV output, position allows setpoint...

  • Page 21: Cold

    3.10 Cold FMA-1900 uncontrolled monitoring There Operation instrument Power resumption operating Sensorfailur output (The first drop 4mA, observing.) 3.11 Auto FMA-1900 feature signal setpoint move open setpoint On/Off mechanical option 15-pin “ D” operation Sens valve output operation upon output output depending Shut-O...
  • Page 22 3.13 Purging flushing valve uncontrolled must setpoint command scale Auto-Shutoff open-collecto least appearing 3.13.1 Purging Purge 3.13.2 Purge following Cycle clean, Purge eight Evacuate purge purpos rated Valve open Auto-Shu activation activate 15-pin “ D” conne common non-re nitrogen Purg reactiv purge.
  • Page 23 Appendix A. Pin Connections...
  • Page 24 Appendix C. K-factors and Gas Tables properties Calibrating latly useful called Interpreting calibrated applying tables, Q,/Q,=K where: = The conditions 0°C = The “K” factor refers “actual ” applied where: = The = The given O’ C). upstream correction given Number Monatomic Diatomic...
  • Page 25 K,/K2, instead ratios where Ka*d Kreference ’ equivalent K-factor K,&dKN where used enabling K,/K2 some K,/K, from that preferred Omega with equivalent nying When within mass (gil); proportio combine insert solve get: constan purpos this Q,,) note third gas,...
  • Page 26 EXAMPLE Qco, Kco, KN*, Qco, EXAMPLE QN*O KN*O KH*, (0.71 QN*O = Please used each EXAMPLE (SiH flow. preterred (CF,). What must QSIH~C~ QCF ’ = KsiH2Ch QCF ’ = 0.869 100/0.869 QCF ’ = Equation dual where: rir, Total refers where: (rf+...
  • Page 27 Achul Ch.“dul Sytt’ bol Rd.Ws Acetylene CJ’ , Aflene (Propadiie) C,“, N’ Ammonia Argon A’ A’ Arsine AsH, Boron Trichlodda BC’ , Boron Trtftuoride ’ Bromine B’ , Boron Trib’omide B’ , Bromine Pentafluoride B’ F, Bromine Trfftuoride B’ F, Bronmtdfloromethane CB’...
  • Page 28 Acluol chornlcel Ref Symbol Gas Ret.Gas Deulerium Diborane Dibromodifluoromethane CBr ’F ’ Dibromethane Dichiorodifluommethane CCI ’F, N’ (Freon-12) Dichlorolluoromethane CHCI,F (Freon-21) Dichlommethylsilane (CH,),SiCI, Dichlo ’osilane sIH&I, Dichlorotetralluoroethane t&t&F, (Freon-1, ‘) .l 1 -Difluorcelhytene C,H,Fz (Freon-t 132A) Dimethylamine (CHJ ’NH Dimeyi Ether (CHJ ’O 2.2-Dimethylp ’opana C,H, ’...
  • Page 29 Actual ChOltliCSf svmbol R&Gas Helium HexaRuoroalhane C’ F, (Freon-1 Hexane C,H,, Hydrogen “* Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydnqen fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide Iodine Pentafluorida lsobutane CH(C”,), Isobutytene C,H, Krypton K’ A’ Methane N’ Methand CH,OH Methyl Aoetytene C,H.
  • Page 30 Actual Chemical Raf. K-faC. Symbol Gas Rel. to Ref. Octafluorqclobutane C,F, (Freon-Csr 6) Oxygen Difluodde Oxygen Ozone Pentaborane B,H, Pentane 4H ’ z Perchloryi Fluoride CIOaF Pe ’fl”o ’op ’opane C,F, Phosgene COCI, Phosphine Phosphorous Oxychloride POCI, Phosphorous Pentalluoride F’hosphomus Trichloride PCI, Propane...
  • Page 31 If the unit should malfunction, it must be returned to the factory Customer Service Department will issue an Authorized Return phone or written request. Upon examination by OMEGA, if the unit is found to be defective it will operation outside of design limits, improper repair, or unauthorized modification. This WARRANTY Is VOID If the unit shows evidence of having been tampered with or shows evidence being damaged as a result of excessive corrosion;...
  • Page 32 OMEGA...Of Course! TEMPERATURE Ii?? Thermocouple, RTD & Thermistor Probes, Connectors, Wire: Thermocouple, RTD & Thermistor @’ 0 Calibrators & Ice Point References 0 Recorders, Controllers & Process Monitors 0 Infrared Pyrometers PRESSURE, STRAIN AND FORCE Transducers & Strain Gauges @ ’...

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