Testing Power Distribution Unit (Pdu) (Hp 4062Ux Only) - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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10. Press the LINE
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turn o .
11. Press the LINE
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12. Press the EMERGENCY OFF switch. The instrument should turn o .
13. Check conductivity of the Ext Out 1 and 2 terminals in the emergency o condition by
using a resistance meter. The resistance between the Ext Out 1 terminals should indicate
in nity, and the resistance between the Ext Out 2 terminals should be near 0 .
14. Press the LINE
4 1 5
not turn on.
15. Set the LINE switch of the instrument to the OFF condition.
16. Release the lock of the EMERGENCY OFF switch by using the key.
17. Turn on and o one of the system instruments. Note that the selected instrument must
originally function properly. The instrument should not turn on.
18. Press the LINE
4 1 5
19. Loosen the Ext In terminals and remove the shorting lead connected between the Ext In
terminals. The instrument should turn o .
20. Turn o the instrument and the circuit breaker for the emergency o unit.
21. Reinstall the shorting lead to the Ext In terminals.
22. Turn on the circuit breaker for the emergency o unit.
23. Press the LINE
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Testing Power Distribution Unit (PDU) (HP 4062UX Only)

If your system is furnished with an emergency o unit, skip this test.
This test checks the following item:
Operation of circuit breaker
Use the following procedure to check the test item above:
1. Con rm the power switch of the system cabinet and the line switches of all the system
instruments are set to OFF. The power switch of the system cabinet is located at the
right-front of the PDU. See the
each line switch.
2. Connect the main power cable to the power source at your site.
3. Turn on and o one of the system instruments. Note that the selected instrument must
originally function properly. The instrument should not turn on.
4. Set the SYSTEM ON/OFF switch of the system cabinet to ON.
5. Turn on one of the system instruments. Note that the selected instrument must originally
function properly. The instrument normally should turn on.
switch after turning on a system instrument. The instrument should
switch. The instrument should turn on.
switch. Check that the green indicater of the LINE
switch and turn on one of the system instruments.
switch.
Operation Manual
of each instrument for the location of
System Installation 4-45
switch does
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Hp 4062f

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