HP 4062UX Installation Manual page 142

Semiconductor process control system semiconductor parametric test system
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b. Figure 6-7 shows an example of an HP 16346C calibration data entry page. You can
move the eld pointer by using the arrow keys or the
pointer is displayed in the display area. If you want to change the displayed data,
type in new data, then press
NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN
SAVE/EXIT
Use the same method if you need to enter calibration data for other calibration
modules.
d
c
Figure 6-31. Example of Calibration Data Entry Page: HP 16346C
Calibration data is stored in the /usr/pcs/diag/CAL PV le and is used each
Note
time the PV software is run.
c. After entering the necessary calibration data, select the
the calibration module menu page.
d. Select softkey of your system calibration module.
6-30 System Verification
4 Return 5
softkey to return to the calibration module menu page.
* HP 4062F PERFORMANCE VERIFICATION *
|
|
|
DC
|
| 100 ohm | R | 100.00 ohm |
|
| C |
|
| 1 Kohm | R | 1.0000 Kohm |
|
| C |
|
| 100 pF | C |
|
| 1000 pF | C |
| 1000.0 pF | 1000.0 pF | 1000.0 pF | 1000.0 pF |
| 10 nF
| C |
| 10.000 nF | 10.000 nF | 10.000 nF |
| 100 nF | C |
| 100.00 nF | 100.00 nF |
Enter a value ( 100 ohm ).
100.00
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4 Tab 5
. After entering the calibration data, select the
1 KHz
| 10 KHz
| 100 KHz |
|
|
|
|
|
|
|
|
| 100.00 nF | 100.00 nF | 100.00 nF |
User 1
aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa
CANCEL
key. The data at the eld
1 MHz
|
|
|
| 0.0000 pF |
|
|
| 0.0000 pF |
|
|
|
Caps
Running
SAVE /
EXIT
softkey on
NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN
Start-up Menu
a
b

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