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4
To reinstall the diffusion pump
To reinstall the diffusion pump
Materials needed:
Gloves, oil-resistant
Vacuum cleaner, non-ESD generating (HP 92175V or equivalent)
This procedure works best with two people, one to hold the pump and one to
install the clamp.
1 Vacuum the fan that cools the diffusion pump.
Keeping the fan clean helps ensure maximum cooling. This is one of the few times
you will have convenient access to the pump side of the fan.
2 Slide the diffusion pump into the MSD.
You may have to tilt the pump slightly to get it into the MSD. tilt it past 45°.
3 Install the O-ring assembly on the diffusion pump.
4 Lift the diffusion pump into its normal position.
5 Install the KF50 clamp.
6 Reconnect the diffusion pump temperature sensor wires to the wiring
harness.
7 Reconnect the high vacuum power cable to the
the back panel of the MSD.
This is the thick black cable that emerges near the bottom of the pump.
8 Reconnect the foreline gauge fitting to the outlet of the diffusion pump.
If you disconnected the foreline gauge cable, reconnect it to the foreline gauge.
9 Move the MSD back to its normal position (page 120).
118
Maintaining the MSD
HIVAC POWER
connector on
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