Limited Life Parts - Hitachi TM3030 Plus Instruction Manual

6.2 Limited Life Parts

The parts which are regarded as limited life parts (See Table 6.2) must be replaced in the
specified interval. If the system is continuously used without properly replacing the limited life
parts, it may not only damage the system but cause safety problems. Contact the nearest
service office to schedule the replacements.
Part No.
52E-6688 DFP maintenance kit
55E-1642 SR exhaust tube N assy
55E-1692 Exhaust tube
55E-2681 Pirani gauge
51E-1492 Element
55E-1317 Element (5)
55E-1171 Spring
55E-2810 ACWHND00SP assy
55E-2822 CONTROL20SP assy
55E-2812 COLHVC00SP assy
55E-2803 5CHAMP00SP assy
55E-2824 IO-DRV10SP assy
55E-1160 LED00SP assy
55E-2806 ISAL00SP assy
55E-2807 TMPMCONT00SP assy
55E-2808 REGOUT00SP assy
55E-2815 HVT3SP assy
55E-2823 TMPMHVSP assy
55E-2826 UVDAMPSP1 assy
55E-2827 Photomultiplier assy
55E-2602 NF cord assy
Table 6.2 Limited Life Parts List
Part Name
For DFP maintenance
Exhaust tube between turbo
molecular pump and diaphragm
pump
Exhaust tube and sealing
component between turbo
molecular pump and specimen
chamber
Vacuum level measurement
detector
Leak valve (V1) filter
Slow leak valve (V2, V4) filter
Specimen stage (For lock nut)
Usage
–
–
–
–
–
–
–
–
–
–
–
–
–
–
6 - 2
Replacement
Interval
5 years
5 years
5 years
3 years
5 years
5 years
4 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years