Hitachi TM3030 Plus Instruction Manual page 283

Tabletop microscope
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Code
Error Message
1521
The cooling fan in Main Unit
stopped.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1530
Evacuation System is wrong.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1570
The power supply of -15V for
VA was shut down.
Start up the main unit and
application again.
1571
The power supply of +15V for
VA was shut down.
Start up the main unit and
application again.
1572
The power supply of -15V for
SG was shut down.
Start up the main unit and
application again.
1573
The power supply of +15V for
SG was shut down.
Start up the main unit and
application again.
Countermeasure
Either the FAN (one of the two fans) that cools
the system is not running due to a malfunction
or because the F4, F10, or F9 fuse on the
IO-DRV00 board is blown.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
This message appears when the evacuation
SEQ did not run successfully due to an error
other than the above (1510 ~ 1514) in the
evacuation system.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F5 on the CONTROL0 board) was found.
Click the [OK] button to close the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F4 on the CONTROL0 board) was found.
Click the [OK] button to close the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F3 on the CONTROL0 board) was found.
Click the [OK] button to close the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F2 on the CONTROL0 board) was found.
Click the [OK] button to close the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
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