Hitachi TM3000 Instruction Manual page 257

Code Error Message
1510 Cannot evacuate.
Check if the stage is closed
right.
Check if the diaphragm pump is
working.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1511 The rotation speed of TMP does
not reach the normal level.
Check if there is no vacuum
leakage.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1512 The vacuum does not reach the
normal level.
Check if there is no vacuum
leakage.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
Countermeasure
A time-out (120 s) has occurred during
evacuation.
Click the [OK] button to dismiss the message.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
Make sure the specimen stage and the electron
gun are securely closed. Turn on power for the
main unit while pressing the electron gun against
the specimen stage. Also, make sure the
vacuum tube for the diaphragm pump is not bent
or kinked.
A time-out (300 s) has occurred during
evacuation.
Click the [OK] button to dismiss the message.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
Make sure the specimen stage and the electron
gun are securely closed, and no particles, such
as dust, are trapped.
A time-out (300 s) has occurred during
evacuation.
Click the [OK] button to dismiss the message.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
One of the following factors has occurred: the
specimen chamber is under 1Pa, the TMP
READY signal is not on, or the required rpm for
the TMP has not been attained. If the same
message appears repeatedly after restart of the
system, contact the nearest service
representative.
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