BESTEM – D01R
6. DBI/Chip Inspection
When DBI/Chip inspection button in recognition main screen is clicked, the following screen will be
displayed and DBI/chip inspection teaching can be done. Set according to ①~③ procedure. Basic screen
and basic operation is as in chip recognition setting.
⑤
④
④
②
②
①
DBI-Chip inspection parameter setting tab
(Item: Island Base , Island Template , chip template , AgP spread
* The contents of each item change by the change of Normal user/Super user.
[Setting step] Each item setting procedure will be elaborate from next page.
②
SuperUser button
With SuperUser button, DBI-chip inspection parameter setting tab can be change between Normal user and
super user. ※When DBI-chip inspection setting tab is at super user, the button name will change from
SuperUser to NormalUser .
③
Apply button
Saves DBI/chip inspection parameter. If Return is clicked without clicking Apply first, setting will
return to previously saved setting.
④
REC exe button
Carry out chip inspection trace position. Check if parameters are correct.
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⑥
⑦
①
)
③
③
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