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SCANNING ELECTRON MICROSCOPE
Please read through this manual carefully
before using the instrument.
• Before using the instrument, read the safety
• Keep this manual in a safe place nearby so it
Copyright © Hitachi High-Technologies Corporation. 2002. All rights reserved. Printed in Japan. Part No. 539-8050
INSTRUCTION MANUAL
FOR
MODEL S-4800
FIELD EMISSION
instructions and precautions carefully.
can be referred to whenever needed.
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Summary of Contents for Hitachi S-4800
- Page 1 • Before using the instrument, read the safety instructions and precautions carefully. • Keep this manual in a safe place nearby so it can be referred to whenever needed. Copyright © Hitachi High-Technologies Corporation. 2002. All rights reserved. Printed in Japan. Part No. 539-8050...
- Page 2 NOTICE: Information contained in this document is subject to change without notice for improvement. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation.
- Page 3 FOREWORD • The S-4800 SEM utilizes electron beam accelerated at 500 V to 30 kV. APPLICATION The instrument is designed mainly for observation and evaluation of specimens prepared for observation using SEM. • Note that Hitachi High-Technologies Corporation will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual.
- Page 4 Accessory Operation This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-4800 scanning electron microscope. First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines.
- Page 5 (a) Failure due to use in improperly installed condition. (b) Failure due to power supply voltage/frequency other than specified by Hitachi High-Technologies Corporation or due to power failure. (c) Corrosion or deterioration of the tubing due to impurities contained in gas, air or cooling water supplied by the customer.
- Page 6 LIMITATION THEREOF, GUARANTEES AS TO MARKETABILITY, MERCHANTABILITY, FOR A PARTICULAR PURPOSE OR USE, OR AGAINST INFRINGEMENT OF ANY PATENT. IN NO EVENT SHALL HITACHI HIGH-TECHNOLOGIES CORPORATION BE LIABLE FOR ANY DIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES OF ANY NATURE, OR LOSSES OR EXPENSES RESULTING FROM ANY DEFECTIVE PRODUCT OR THE USE OF ANY PRODUCT.
- Page 7 INSTALLATION AND AFTER-SALES SERVICE Installation • Installation at delivery will be carried out by Hitachi High-Technologies Corporation installation engineers. • Before installation, refer to section 1 and prepare the necessary utilities. • Installation at another place after delivery will be provided at charge. Consult your nearest Hitachi High-Technologies Corporation service representative for details.
- Page 8 Available Training Programs Hitachi High-Technologies Corporation offers various kinds of training programs at its own facilities or at the user’s site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them.
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Page 9: Safety Summary
Follow all the operating procedures provided in this manual. • Installation and maintenance must be entrusted to personnel who have received training at and are authorized by Hitachi High-Technologies Corporation. • Pay special attention to and follow all the hazard warnings on the machine and in the manual. - Page 10 The customer is responsible for proper ventilation of the room when using chemicals. Inadequate ventilation could cause a health hazard. • Maintenance up to 4.4 in section 4 must be entrusted to the service engineers (of Hitachi Instrument Service). The user should not carry out these procedures. •...
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Page 11: Electrical Hazard
Electrical Hazard Electrical hazards exist due to the following: Electron Gun : 0.5 to 30 kV DC Ion Pump : 5 kV DC Photomultiplier : 1 kV DC Scintillator of secondary electron detector : 10 kV DC Electrode 1 : 50 V DC Electrode 2 : 200 V (Max) DC Electrode 3... - Page 12 High Temperature Hazard Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside the part. When baking, the surface of the gun housing and ion pumps reaches around 250 °C. The electron gun part is surrounded by a metal guard to prevent high temperature hazard caused by direct contact.
- Page 13 Laser light Hazard The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Personal Computer with a laser device complies with safety standards, including International Electrotechnical Commission (IEC) 825. With specific regard to the laser, the equipment complies with laser product performance standards set by US government agencies for a Class 1 laser product.
- Page 15 Pinch...
- Page 18 WARNING • Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you may receive an electric shock. • Do not remove the covers of column unit, control unit or power unit and do not touch internal parts or circuits while the instrument power is turned on.
- Page 19 WARNING (cont’d) The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Be sure to observe the following warnings when operating a product equipped with a laser device. ・ Do not try to open the unit enclosure. There are no user-serviceable components inside.
- Page 20 Hitachi shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.