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Hitachi
S -4100
F ieldD
E mission
S canning
E lectron
M icroscope
General
I nformation:
Hitachi
f ield
e mission
s canning
e lectron
m icroscope
c onverted
t o
e lectron
beam
w riting
b y
u sing
n anometer
p attern
g enerating
s ystem
( NPGS)
Equipment
S pecifications:
-‐
Resolution:
1 5
-‐
Magnification:
2 0
t o
3 00,000x
-‐
Electron
g un:
C old-‐cathode
f ield
e mission
e lectron
g un
€
o
a t
3 0
K V
A
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Summary of Contents for Hitachi S-4100
- Page 1 Hitachi f ield e mission s canning e lectron m icroscope c onverted t o e lectron beam w riting b y u sing n anometer p attern g enerating s ystem ( NPGS) ...
- Page 2 Operating I nstructions: 1 -‐ On Evacuation Control Panel Check the followings and make sure they are functioning p roperly o ther w ise d o n ot u se t he s ystem: ...
- Page 3 Rotate T ransfer R od c ounter C .W. u ntil R od c ompletely f ree Pull b ack t he T ransfer R od t ill i t l ocks Close ...
- Page 4 You c an g radually M agnify & F ocus t o r each 1 0K Go t o C OLUMN A DJUSTMENT o r P F3 Chose ...
-
Page 5: Shut D Own O Peration
* Open window on PC1 – 1, this scans once and grabs the image only once on PC1 – 1 . O r, o pen w indow o n P C1-‐ ∞ , this s cans c ontinuously ( you c an z oom i n a nd out ... - Page 6 Unload s ample h older f rom T ransfer R od t hen c lose t he d oor & h old c losed Push ...