Specifications - Canon ANELVA M-332MX Operation Manual

1 Crystal Ion Gauge M-332MX Outline
The A-NET Crystal Ion Gauge M-332MX is a transducer model
vacuum gauge that can measure pressures over a wide range from 4 x
-8
10 Pa to atmospheric pressure. The vacuum gauge controller and the
gauge head are incorporated into a single body.
This vacuum gauge is a combination vacuum gauge that uses a
crystal type vacuum gauge (crystal gauge), which employs a crystal
oscillator, for measuring in the high-pressure region and a ionization
vacuum gauge (B-A gauge) for measuring in the low-pressure region.
By a combination of pressure measurements, it is possible to measure
pressures over a wide range from 4 x 10
by a single vacuum gauge.
2

Specifications

Item
Gauge head
Pressure measurement range
Input power supply
Degas method
Input control signal
B-A filament ON/OFF
Crystal gauge zero adjustment
Crystal gauge ATM adjustment
Pressure measurement
gas type
Analog output
B-A unit filament protection
operation
Gauge head filament
Gauge head flange type
Display LED
Connector type
External dimensions
Operating environment
-8
Pa to atmospheric pressure
Table 1 Specifications
Model name: MX1
Crystal type vacuum gauge (crystal gauge) and ionization vacuum gauge (B-A gauge)
combination gauge
-8
4 x 10 Pa to atmospheric pressure
Crystal gauge measurement range: 1 Pa to atmospheric pressure
B-A gauge measurement range: 4 x 10
* The lower limit pressure measurement range is indicated by the soft X-ray limit.
The lower limit pressure of the effective pressure measurement range varies depending on the
gauge head connecting flange together with the pumping system configuration and pumping system
operating conditions. (As a guideline, KF flange type: 10
DC 22 to 26 V (Maximum power consumption 12 W: when filament and degas are ON)
Note: Due to the inrush current when the power is switched ON, prepare a DC power supply that has
current capacity of 1.6 Amps or higher.
Grid power ON
① Filament ON/OFF
② Degas ON/OFF
③ Crystal gauge zero reset input
④ Crystal gauge ATM reset input
Controlled by the filament ON/OFF signal.
① Manual control: zero is adjusted by the switch on the rear panel.
② Remote control: zero is adjusted by external input.
③ Auto mode: when the B-A gauge switches ON, if the B-A measurement pressure remains below
the zero reset allowing pressure (1.33 x 10
minutes.
① Manual control: ATM is adjusted by VR on the rear panel.
② Remote control: ATM is adjusted by external input (set to the value set by VR)
N gas conversion
2
The crystal gauge measurement pressure and the B-A gauge measurement pressure are output by
a single analog signal.
Output: LOG output (0 to 10 V)... See Section 6 (3) for details of the analog output.
Output impedance: Approx. 100 Ω
Over range (when operating above 13 Pa) and emission error (when over ± 50%)
<The error is reset by switching OFF the filament control signal. >
Yttoria coated iridium single filament
KF40
Crystal gauge operation
B-A gauge operation (B-A filament ON/OFF status)
D-Sub 15P
See Page 5
Temperature: 5 to 40℃ (electronics included), humidity: 70% or lower
Gauge head only temperature resistance: 150℃ maximum
Specification
-8
Pa to 13 Pa
-6
Pa, ICF flange type: 10
-2
Pa) the zero point is automatically adjusted every 5
3
FT651-059
Crystal Ion Gauge M-332MX
-7
Pa)