Canon ANELVA M-332MX Operation Manual page 10

A-net crystalion gauge
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(3)
7
Replacing the Gauge Head
(1)
Input Signal Use Example
Controller internal circuit
PS2501(k)
Figure 2 Input Signal Use Example
Analog Output
When the B-A gauge is OFF, the crystal gauge outputs the measured pressure value
(however, when the B-A gauge protection is operating, an error is output). When the B-A
gauge is ON, it outputs the measured pressure value.
Analog signal pressure conversion equation
Pressure unit = Pa
(Press/133.33) + 6.875 ← → Press/133.33 = 10
V
= 0.6 x Log
out
10
Conversion table
Analog Output V
[V]
out
< 0.4
> 9.5
The lowest voltage output during pressure measurement (except when an error occurs) is
the value of the measured pressure lower limit value of each gauge (crystal gauge or B-A
gauge).
When replacing the gauge head, make sure that electric power is
stopped supplying or the remote connector is disconnected. There is a
risk of damaging the controller unit.
Detaching the Gauge Head
Loosen this M3 screw to
detach the gauge head
6.8k
Ext Vcc IN
FIL ON/OFF INPUT
Ext Vcc COM
D-Sub connector
Sensor error
Sensor error (at crystal gauge failure or when B-A gauge protection is
operating)
7
External circuit
+24V
FIL ON/OFF input use example
((Vout-6.875)/0.6)
Error Content
FT651-059

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