Troubleshooting - Canon ANELVA M-332MX Operation Manual

A-net crystalion gauge
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9

Troubleshooting

LED
Display
LED OFF
Red illuminated
Red flashing 1
Crystal
Red flashing 2
Red illuminated
B-A
Red flashing
For the methods of troubleshooting, see Table 6 below.
Table 6 Troubleshooting
Check the power is supplied to the crystal gauge. If not restored even if the power is
supplied, contact Canon Anelva.
Contact Canon Anelva
Check the gauge head is properly connected to the controller. If there is no connection
Note 1
error, the crystal oscillator may have stopped oscillating inside the gauge head due to
broken wiring, etc. Replace the gauge head.
Error when adjusting zero:
Adjust the zero at a pressure of 10
If there is no improvement, replace the gauge head.
Note 2
Error when adjusting ATM:
Adjust the ATM pressure in the adjustment range.
If there is no improvement, replace the gauge head.
The B-A gauge filament may be broken. Replace the gauge head.
The measurement may have exceeded the B-A gauge measurement range. Check the
pressure.
(Note 1)
Red flashing 1
(sensor error)
(Note 2)
Red flashing 2
(zero adjustment error)
Figure 3 Crystal LED Error Flashing
Course of Action
-2
Pa or below.
10
FT651-059

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