ONTRAK Synergy Integra Operation Manual page 4

In addition to the Operations manual, the other Integra manuals are the
Maintenance manual (Volume 2 of 5), Troubleshooting manual (Volume 3 of 5),
Spare Parts manual (Volume 4 of 5), and Installation manual (Volume 5 of 5). The
Spare Parts manual contains assembly drawings and part lists for the system and
its major modules: Input Station, Brush Station #1, Brush Station #2, and Spin
Station. The Troubleshooting manual includes system schematics, electrical
interconnect diagrams, and facility layout drawings.
Lam Research Corporation strives to continually improve products and often
creates custom configurations for our customers on special request. Additional
information is available from Lam Customer Service (Field Service) or through a
specially tailored instruction program.
iv INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)