Hitachi HF2000 TEM Operation Manual page 20

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Select "Acquire" → "Parameter" → "Set up". Set the max. energy to 20.48 keV.
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Find region of interest.
Notice: When the dead time is too high (over 30%), select smaller condenser aperture, or acquire
spectrum from thinner region.
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Open the "Analyze" menu and select "Manual Region of Interest ..."
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Choose the element and lines for element mapping
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Open the "Image Display" and select [Xray1: Map1] on left cell.
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