Asyst Technologies VersaPort 2200 Technical Manual page 212

VersaPort 2200 Technical Manual
Appendix B: Communications Software
ASCII Serial Text Interface
T 28
HCS Commands (Continued)
ABLE
(XX)
CLOSE
RESEAT
SELF-TEST
RESET
MOVE UP
**distance
MOVE DOWN
**distance
MANUAL
CALIB
STOP
SOFT_STOP
CASSETTE LD
CASSETTE UNLD
CASSETTE NA
CLEAR_SLOT_STATUS
ENABLE_SERVO
DISABLE_SERVO
RESET_SERVO
AUTO
MAN_UNLK
MAN_GOTO
BRAKE_OFF
BRAKE_ON
ADV_SHUTTLE
RET_SHUTTLE
Page 194
Description
Same as HOME
Run wafer seater to reseat wafer
Perform self-test
Clear alarm in VersaPort
Move VersaPort up a specified distance
Move VersaPort down a specified distance
Switch VersaPort into MANUAL mode
Calibrate port-lifter Home position
Abort current operation
Stop vertical drive motion (decelerated
stop)
Confirm cassette present
Confirm cassette not present
Do not care
Clear slot status
Manual Enable the Servo motors
Manual Disable the Servo motors
Manual Reset the Servo motors
Switch VersaPort into AUTO mode
Manual Unlock command
Move port door to specified absolute
position while the Load Port is in
MANUAL mode
Turn the Brake off
Turn the Brake on
Advance the Shuttle in Manual mode
Retract the Shuttle in Manual mode
2000-1252-01
a
(ref. SECS
RCMD)
13
14
15
16
17
17
18
19
20
83
84
84
84
85
129
130
131
133
148
149
154
155
161
162
Released Rev. C