Asyst Technologies VersaPort 2200 Technical Manual page 172

VersaPort 2200 Technical Manual
Appendix B: Communications Software
SECS Communication
T 20
Data Dictionary (Continued)
ABLE
Variable
ECID
NOTE-
Equipment Constant
ID descriptions are
provided in "ECID
Descriptions" on
page 161.
ECV
EED
ELDN
ELSTAGE
Page 154
Definition
Equipment Constant I.D.
4 = EXT_HOST Default = 1
6 = PIO_MODE Default = 0
13 = MSC_INTLK Default = 0
32 = MIN_WAFER_POS Default = 2990
33 = STAGE_POS Default = 11.400
34 = SLOT_CNT Default = 25
(No. of cassette slots)
35 = SLOT_PITCH Default = 0.25 inch
(Pitch from slot-to-slot in cassette)
37 = SINGLE_PORT Default = 0
38 = HOST_OPTION Default = 0
(use Serial SECS interface to control an VersaPort)
39 = CASSETTE_SIZE_ Default = 0
OPTION (standard: 200mm)
40 = DEVICE I.D. Default = 251
41 = BAUD_RATE. Default = 9600
42 = DEDICATED TAG Default = off
PROTOCOL
50 = SECS TIMEOUT T1 Default = 1 sec
51 = SECS TIMEOUT T2 Default = 2 sec
52 = SECS TIMEOUT T3 Default = 0
(0 means 6 sec)
59 = SUBSTRATE HGT Default 30
61 = ELEV HOME OFFSET Default = 0
63 = DEFAULT CASSETTE Default = 0
PRESENT CONFIRMATION
67 = CASSETTE BASE OFFSET Default = 0
85 = FSD ASCII OPTION Default = 0
86 = STAGE SEATER OUT Default = 0
87 = SHUTTLE ADV POS Default = 4100
89 = SHUTTLE OPTION Default = 0
90 = SHUTTLE HOME OFFSET Default = 0
91 = FRONTLOAD COMPATIBLE Default = 0
92 = TAG_PROBE_BAUD Default = 9600
98 = BRAKE OPTION Default = 0
Equipment Constant Value
Event Enable / Disable
0 = Disable
1 = Enable
Port lifter at top limit
0= Not at top limit
1= At top limit
Port lifter at Stage, variable
0 = False
1 = True
2000-1252-01
a
Where Format
Used
S2,F13
S2,F14 A5
S2,F15
Based
S2,F14
on
S2,F15
ECID
S1,F6
A5
S2,F38
S1,F6
A5
S2,F33
S1,F6 A5
Released Rev. C