Asyst Technologies VersaPort 2200 Manuals

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Asyst Technologies VersaPort 2200 Technical Manual

Asyst Technologies VersaPort 2200 Technical Manual (288 pages)

Brand: Asyst Technologies | Category: Industrial Equipment | Size: 8.7 MB

Table of Contents

Disclaimers
3
Equipment Modification
3
Manual Information
3
Trademarks
3
Training and Languages
3
Warranty
3
Reader Comments
4
Revision History
5
Acronyms
7
Table of Contents
9
List of Figures
15
List of Tables
17
Preface
19
- Introduction
  19
  - Core Products
    19
  - Options
    19
- Audience
  19
- About this Manual
  20
- Conventions
  21
Chapter 1: Safety

23
- General Safety Identifiers
  23
- Responsibility
  25
- ESD/EMI Precautions
  25
- EMO & Electrical Power
  25
  - Equipment Lockout/Tagout Procedure
    26
- Laser Safety
  27
  - User
    27
  - Service Technician
    27
  - Safety Interlocks
    27
    
    Laser Interlock
    27
  - Seismic
    28
  - Pinch Points
    28
- Labeling
  30
Chapter 2: Theory of Operation

35
- Figure 4 Versaport Components (with BOLTS Interface)
  36
  - Figure 5 Versaport Components (Standard)
    37
  - Operating Sequence
    38
    
    Self Test
    38
    
    Staging Sequence
    38
  - Versaport Components
    39
    
    Electrical Power
    39
    
    Electronics
    39
    
    Mechanical
    39
    
    Port Door
    39
    
    Cpu
    40
    
    Program Memory
    40
    
    Quad-Serial I/O
    40
    
    Sram
    40
    
    Digital I/O
    41
    
    Figure 6 Versaport Connector Panel
    41
    
    Interlocks, Parallel, I/O
    41
    
    Interrupt Controller
    41
    
    Sensors
    41
    
    Laser Detector System
    42
    
    Figure 7 Laser Detector System
    43
    
    Excessive Wafer Protrusion Sensor, Vertical View
    44
    
    Figure 8 Laser Detector Example (Viewed through Port Plate)
    44
    
    Motor Controls
    44
    
    Pod Latch and Wafer Seater Motors
    45
    
    Pod-Door Lock/Unlock Motor
    45
    
    Port Plate Elevator and Cassette Shuttle Motors
    45
    
    Air Exhaust Motor
    46
    
    Communications Interface
    46
    
    Figure 9 Status Indicators
    46
    
    Pod-In-Place Indicator
    46
    
    Power Indicator
    46
    
    Ready Indicator
    46
    
    Serial Communications Interface
    46
    
    Status Indicators
    46
    
    Table 2 Serial Port Pin Usage
    46
    
    Parallel Communications Interface
    47
    
    Table 3 Parallel Communications Interface - Asyst Compatible
    48
    
    Configuration
    49
    
    History
    49
    
    Novram
    49
  - Specifications and Outline Drawing
    51
  - Table 4 Versaport Specifications
    51
  - Figure 10 Outline Drawing, Side View
    52
  - Figure 11 Outline Drawing, Rear View
    53
  - Figure 12 Outline Drawing, Front View
    54
  - Figure 13 Outline Drawing, Overhead View
    55
  - Figure 14 Outline Drawing, I/O Panel Detail
    56
  - Figure 15 Recommended Mounting Method
    57
  - Figure 16 BOLTS Interface
    58
  - Figure 17 Versaport Mounted on BOLTS Interface in Free Standing Position
    59
  - Figure 18 Versaport Terms
    60
Chapter 3: Diagnostics and Troubleshooting

61
Chapter 4: Service

75
- Safety Requirements
  75
  - General Safety
    75
  - Electrical Safety
    76
  - Mechanical Safety
    76
  - Chemical Safety
    76
- Tool Requirements
  76
- Notes on Removing and Replacing Versaport
  77
- Preventive Service Procedures
  78
- PSP1 - Verify Laser Sensor DAC Values
  79
  - Verify DAC Values and Operation
    79
- Calibration/Alignment Procedures
  81
- CAP1 - Align Laser Detector System
  82
  - Pre-Service
    82
  - Remove Minienvironment
    82
  - Service
    83
  - Adjust Laser Beam Orientation
    83
  - Figure 19 Laser Detector System (Bottom View)
    84
  - Figure 20 Laser Beam Orientation
    84
  - Adjust Wafer Sensor Beam
    85
  - Figure 21 Laser Bracket Assembly
    85
  - Figure 22 Spring Tension
    86
  - Adjust Slot Sensor Beam
    87
  - Adjust Corner Mirror
    88
  - Figure 23 Mirror Adjustment
    88
  - Adjust Wafer Protrusion Sensor
    89
  - Adjust Mirrors
    90
  - Adjust Protrusion Mirror
    91
  - Verify DAC Values and Operation
    91
  - Post-Service
    93
- CAP2 - Align Excessive Wafer Protrusion Sensor, Vertical View
  94
  - Pre-Service
    94
  - Remove Minienvironment
    94
  - Service
    95
  - Service
    96
  - Figure 24 Wafer Excessive Protrusion Sensor
    96
  - Post-Service
    97
  - Figure 25 Excessive Protrusion Sensor
    97
- CAP3 - Align Wafer Seater Mechanism
  99
  - Pre-Service
    99
  - Remove Minienvironment
    99
  - Service
    100
  - Figure 26 Wafer Seater Mechanism, Top View
    100
  - Figure 27 Wafer Seater Mechanism, Side View
    101
  - Figure 28 Wafer Seater Mechanism, Bottom View
    102
  - Post-Service
    104
- CAP4 - Calibrate Shuttle Homing Offset
  105
  - Pre-Service
    105
  - Service
    105
  - Adjust Cassette Shuttle Home Position
    107
  - Post-Service
    109
- CAP5 - Align Pod Hold down Latches
  110
  - Pre-Service
    110
  - Service
    110
  - Post-Service
    111
- CAP6 - Align Pod-In-Place Switch
  112
- Figure 29 200Mm Port Door (Bottom View), Pod in Place Switch
  113
- Figure 30 200Mm Port Plate Pod-In-Place Switch (Side and Top Views)
  114
- Corrective Service Procedures
  116
- CSP1 - Pod Latch Motor Replacement
  117
  - Pre-Service
    117
  - Service
    117
  - Post-Service
    119
- CSP2 - Pod Door Lock Motor Replacement
  120
  - Pre-Service
    120
  - Remove Minienvironment
    120
  - Service
    121
  - Figure 31 Gasket Inside Port Door Cover
    123
  - Figure 32 Routing Cable through Opening in Port Door Cover
    123
  - Post-Service
    124
- CSP3 - Laser Diode Replacement
  125
  - Pre-Service
    125
  - Post-Service
    126
- CSP4 - Cassette Shuttle Motor Replacement
  127
  - Remove Minienvironment
    127
  - Service
    128
  - Post-Service
    129
- CSP5 - Vertical Drive Motor Replacement
  131
  - Pre-Service
    131
  - Service
    131
  - Post-Service
    133
- CSP6 - Replace Printed Circuit Board
  134
- Figure 33 Versaport Base, Connector Panel
  134
- Figure 34 Versaport Bottom Plate, Screw Locations
  135
- Figure 35 Versaport Circuit Board
  137
Appendix A: ISIM

141
- Indexer Simulator (ISIM) Menu List
  141
- Figure 36 ISIM Main Menu
  141
- Figure 37 F1 - AUTO Menu
  142
- Table 11 Auto Mode
  142
- Figure 38 F2 - MANUAL Menu
  144
- Table 12 Manual Mode
  145
- Figure 39 F3 - MSC (SAM) Menu
  146
- Table 13 MSC (SAM) Menu
  146
- Figure 40 F5 - STATUS Menu
  147
- Table 14 Status Menu
  147
- Figure 41 F6 - CONFIG Menu
  149
- Table 15 Configuration Menu
  149
- Figure 42 F7 - Tag8400 Menu
  152
- Table 16 Tag8400 Menu
  152
- Figure 43 F9 - SMIF OPTION Menu
  153
- Table 17 SMIF Option Menu
  153
Appendix B: Communications Software

155
- Introduction
  155
  - Software Configuration of the Versaport
    155
- SECS Communication
  156
  - SECS Guidelines
    156
    
    Communications Protocol
    156
    
    Figure 44 SECS Message Block
    156
    
    Serial Parameters
    156
    
    Table 18 List of Control Characters
    156
    
    Table 19 SECS Message Summary
    157
  - SECS Messages
    158
    
    Stream and Function Codes
    160
  - Data Dictionary
    168
  - Table 20 Data Dictionary
    168
  - ECID Descriptions
    179
    
    External Host (ECID 4)
    179
    
    Msc Interlock (Ecid 13)
    180
    
    PIO Interlock (ECID 6)
    180
    
    Min Wafer Pos (Ecid 32)
    181
    
    Single Port (Ecid 37)
    181
    
    Slot Count (Ecid 34)
    181
    
    Slot Pitch (Ecid 35)
    181
    
    Sort Mode (Ecid 16)
    181
    
    Stage Pos (Ecid 33)
    181
    
    Host Option (Ecid 38)
    182
    
    Baud Rate (Ecid 41)
    183
    
    Cassette Size Option (ECID 39)
    183
    
    Device I.D. (Ecid 40)
    183
    
    SECS Communication Timeout T1 (ECID 50)
    183
    
    SECS Communication Timeout T2 (ECID 51)
    183
    
    Cassette Present Confirmation (ECID 63)
    184
    
    MRP Type (ECID 166)
    184
    
    SECS Communication Timeout T3 (ECID 52)
    184
  - Microstation Controller (MSC) Communications Specification
    185
    
    Controlling Lots through the MSC
    185
    
    Tracking Lots through the Tag Reader
    185
  - Example of Data Exchange for a Simple "Are You There" Request
    186
  - Sample SECS Messages between Host Tool and Vport
    187
- ASCII Serial Text Interface
  198
  - ASCII Port Parameters
    198
    
    Communication Parameters
    198
    
    Communication Port
    198
    
    Syntax
    199
  - Message Summary
    200
    
    Quick Reference
    200
    
    Table 21 ASCII Command Summary
    200
    
    ASCII Details
    201
    
    Table 22 Event Messages
    201
    
    Table 23 Equipment Constant Acknowledgments
    203
    
    Table 24 Equipment Constant Codes
    205
    
    Table 25 Formatted Status Data (Form Code 0)
    208
    
    Table 26 FSD Message List, Form Code = 0
    208
    
    Table 27 Host Command Replies
    210
    
    Table 28 HCS Commands
    211
    
    Table 29 RCS Reply Messages
    213
    
    Table 30 RCS Commands
    214
- Parallel Communication
  215
  - Summary of Control Signals
    215
    
    Control Signal Descriptions
    215
    
    Figure 46 CLOSE Cycle Event Diagram
    215
    
    Table 31 Input Signals
    215
    
    Table 32 Output Signals
    215
    
    Event Flow
    218
    
    Figure 45 OPEN Cycle Event Diagram
    218
Appendix C: Material Safety Data Sheets

221
- Loctite 222
  221
- Loctite 242
  221
- Loctite 290
  222
- Loctite 680
  222
- Krytox GPL-20X and 50X Fluorinated Grease
  223
Appendix D: Wiring Diagrams and Drawings

225
- Table 33 Versaport Wiring Diagrams and Drawings
  225
- Index
  287

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