Beam Axis Adjustment - Hitachi TM3000 Instruction Manual

5.2 Beam Axis Adjustment

1. Press the [EVAC/AIR] switch. Verify that the evacuation of the specimen chamber is
finished. After replacing the filament (see Section 5.1), set the supplied standard specimen
(see Sections 4.2.2 and 4.2.3) in the center of the stage, press the [EVAC/AIR] switch, and
verify that the evacuation of the specimen chamber is finished. When the blue LED lights up,
it is an indication that the evacuation is complete.
Blue LED on
Figure 5.2-1 Verifying the Evacuation of the Specimen Chamber
2. Activate the application.
From the Operation Window for the application, click the Start button to commence the
irradiation by the electron beam (with HV-ON).
Click
Figure 5.2-2 Starting the Application
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