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Hitachi S-4100 Manual page 4

Fieldd emission scanning electron microscope

You c an g radually M agnify & F ocus t o r each 1 0K

Go t o C OLUMN A DJUSTMENT o r P F3

Chose A pert. A lign ( t his i s w here w obble c omes i n a nd y ou n eed t o f ix i t)

Go to X & Y knobs on the column to align (this adjust the aperture on the

column t o g et r id o f w obbling)

Push E XIT t o e xit A lignment m ode

Note: W hen R ed l ight f or A lignment o n S TIGMA/ALIGNMENT s ection i s o n. I t

means u se X ,Y t o a lign i t

Note: m ake s ure t o d o T V R ate

7-‐ C heck t he S tigmatism F or X a nd Y

Push T V R ate

Go t o C OLUMN A DJUSTMENT o r P F3

Choose S tig. A lign X

Adjust w ith X ( Stigmatism) t o m inimize m ovement o n d isplay

Exit

Go t o C OLUMN A DJUSTMENT o r P F3 a gain

Choose S tig. A lign Y

Adjust w ith Y ( S tigmatism) t o m inimize m ovement o n d isplay

Exit

8-‐ F ocusing t he I mage ( u se F OCUS K NOBS & S TIGMAN/ A LIGNMENT k nobs)

Use C OARSE f ocus, t hen F INE f ocus

Notice i f i mage i s s tretching w hile y ou t urn f ocus k nobs i n/out o f f ocus

If s o, n eed t o s tigmate u sing t he S TIGMA / A LIGNMENT k nobs.

9-‐ N ow R eady t o o perate t he S ystem

Taking i mage l ive ( using i mage g rabber):

Focus t he i mage

Push A BC ( Automatic B rithness a nd C ontrast )

Open t he F rame G raber P rogram o n C omputer # 1( Q uartz P C1)

Open ( Close S hortcut t o p ci)

Push A o n S can S peed*

Then p ush d irect

When t he s canning i mage i s o ver, y ou'll h ear s ingle b ib.

Now p ush t he A o n S can S peed ( t o g o b ack t o l ive i mage)