Download Print this page

Hitachi S-4100 Manual page 2

Fieldd emission scanning electron microscope

Advertisement

Operating   I nstructions:  
1  -­‐  On  Evacuation  Control  Panel  Check  the  followings  and  make  sure  they  are  
functioning   p roperly   o ther   w ise   d o   n ot   u se   t he   s ystem:  
 
The   E VAC   P OWER   s witch   i s   O N   ( must   s tay   o n   a ll   t he   t ime)  
-
The   H eat   s witch   ( objective   a perture)   i s   O N   ( must   s tay   o n   a ll   t he   t ime)  
-
The   I P1,   I P2   a nd   I P3   l amps   a re   l it  
-
Check  the  pressure  for  IP
-
log   i t  
The   S C   ( specimen   c hamber)   V ACUUM   l amp   i s   o n   H IGH  
-
The   S EC.(specimen   e xchange   c hamber)   V ACUUM   l amp   i s   o n   H IGH  
-
The   S EC   V ALVE   i s   C LOSED   ( Red   l amp   l it)  
-
The   S C   A IR   L OCK   V ALVE   i s   C LOSED   ( Red   l amp   l it)  
-
The   E VAC   s witch   ( green   p ush   b utton   s witch)   i s   O N  
-
The   S C/SEC   s witch   i s   o n   S EC  
-
Turn   O n   D ISPLAY   P OWER   s witch.  
-
 
 
P repare   S amples     ( Specimen)  
 
 
Wear   a   pair   of   Gloves,   make   sure   gloves   stay   free   of   any   kind   of  
-
contamination   t o   k eep   t he   i nside   s ystem   c lean    
Samples   ( Specimens)   m ust   b e   c ompletely   d ried  
-
Use   c arbon   c onductive   t abs   t o   m ount   s ample   o n   s ample   h older  
-
Adjust  the  height  of  sample  holder  with  LEVEL  GAUGE  (level  gauge  is  on  top  
-
of   S .E.C.   c hamber)  
 
 
Loading   S ample:  
 
SC   A ir   L ock   V alve   C losed    
-
Make   s ure   H igh   V oltage   i s   O FF   o n   d isplay   u nit  
-
Set   S C/SEC   s witch   t o   S EC  
-
MV-­‐1   V alve   i s   C losed   (   t hrough   v iewing   w indow   y ou   c an   s ee   t he   v alve)  
-
Push   A IR   s witch   ( red   b utton)   t o   V ent    
-
Load   s ample   h older   o n   E xchange   R od   p ull   b ack   t ill   l ock   t hen   c lose   t he   d oor   &  
-
hold   c losed    
Push  EVAC  to  Rough  the  SEC  (wait  till  green  light  for  SEC  VACUUM  HI  lights  
-
up   )  
Set   L OCK/FREE   s witch   t o   F REE  
-
On   J oystick   p ush   E xch.   a nd   E nter   t o   p ut   S pecimen   S tage   o n   M ounting   p osition    
-
  O n   D isplay   U nit   p ush   c amera   b utton   (   t o   v iew   l oading   )  
-
Open   A ir   l ock   l ever   (   M V   –   1   )   t o   t ransfer   s ample   h older   f rom   S EC   t o   S C  
-
You   c an   v iew   o n   d isplay   m onitor   2   w hile   t ransferring   &   m ounting   o n   s tage    
-
<  .5x10
 Pa,  IP
 <1.5x10
-­‐7
1
2
 Pa  ,  IP
 <6x10
 Pa    and  
-­‐7
-­‐6
3
 

Advertisement

loading