Operating
I nstructions:
1
-‐
On
Evacuation
Control
Panel
Check
the
followings
and
make
sure
they
are
functioning
p roperly
o ther
w ise
d o
n ot
u se
t he
s ystem:
The
E VAC
P OWER
s witch
i s
O N
( must
s tay
o n
a ll
t he
t ime)
-
The
H eat
s witch
( objective
a perture)
i s
O N
( must
s tay
o n
a ll
t he
t ime)
-
The
I P1,
I P2
a nd
I P3
l amps
a re
l it
-
Check
the
pressure
for
IP
-
log
i t
The
S C
( specimen
c hamber)
V ACUUM
l amp
i s
o n
H IGH
-
The
S EC.(specimen
e xchange
c hamber)
V ACUUM
l amp
i s
o n
H IGH
-
The
S EC
V ALVE
i s
C LOSED
( Red
l amp
l it)
-
The
S C
A IR
L OCK
V ALVE
i s
C LOSED
( Red
l amp
l it)
-
The
E VAC
s witch
( green
p ush
b utton
s witch)
i s
O N
-
The
S C/SEC
s witch
i s
o n
S EC
-
Turn
O n
D ISPLAY
P OWER
s witch.
-
P repare
S amples
( Specimen)
Wear
a
pair
of
Gloves,
make
sure
gloves
stay
free
of
any
kind
of
-
contamination
t o
k eep
t he
i nside
s ystem
c lean
Samples
( Specimens)
m ust
b e
c ompletely
d ried
-
Use
c arbon
c onductive
t abs
t o
m ount
s ample
o n
s ample
h older
-
Adjust
the
height
of
sample
holder
with
LEVEL
GAUGE
(level
gauge
is
on
top
-
of
S .E.C.
c hamber)
Loading
S ample:
SC
A ir
L ock
V alve
C losed
-
Make
s ure
H igh
V oltage
i s
O FF
o n
d isplay
u nit
-
Set
S C/SEC
s witch
t o
S EC
-
MV-‐1
V alve
i s
C losed
(
t hrough
v iewing
w indow
y ou
c an
s ee
t he
v alve)
-
Push
A IR
s witch
( red
b utton)
t o
V ent
-
Load
s ample
h older
o n
E xchange
R od
p ull
b ack
t ill
l ock
t hen
c lose
t he
d oor
&
-
hold
c losed
Push
EVAC
to
Rough
the
SEC
(wait
till
green
light
for
SEC
VACUUM
HI
lights
-
up
)
Set
L OCK/FREE
s witch
t o
F REE
-
On
J oystick
p ush
E xch.
a nd
E nter
t o
p ut
S pecimen
S tage
o n
M ounting
p osition
-
O n
D isplay
U nit
p ush
c amera
b utton
(
t o
v iew
l oading
)
-
Open
A ir
l ock
l ever
(
M V
–
1
)
t o
t ransfer
s ample
h older
f rom
S EC
t o
S C
-
You
c an
v iew
o n
d isplay
m onitor
2
w hile
t ransferring
&
m ounting
o n
s tage
-
<
.5x10
Pa,
IP
<1.5x10
-‐7
1
2
Pa
,
IP
<6x10
Pa
and
-‐7
-‐6
3