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Hitachi S-4100 Manual page 3

Fieldd emission scanning electron microscope

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Rotate   T ransfer   R od   c ounter   C .W.   u ntil   R od   c ompletely   f ree  
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Pull   b ack   t he   T ransfer   R od   t ill   i t   l ocks  
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Close   A ir   l ock   l ever   (   M V   –   1   )   t o   i solate   S C   f rom   S CE  
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Turn   o ff   c amera  
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Check   t he   p ressure   f or     I P
-
 
 
 
Preparing for OBSERVATION OF SECONDARY ELECTRON
IMAGE:
 
 
1-­‐   T o   T URN   H I   V OLTAGE   O N.   D o   t he   f ollowing  
 
 
-­‐   O pen   S C   A ir   L ock   V alve   ( pull   a nd   l eft)  
-­‐   P ush   O N   ( ON   A DJ)  
 
2-­‐FLASHING:   S o   i f   >   8   h ours   s ince   l ast   f lash,   o r   i f   e mission   c urrent   b ecomes   u nstable  
after   2   t o   8   h ours    
 
Turn   O FF     H V   ( READY)  
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Push   F LASH   ( STANDBY)  
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Push   ON   (   ON   ADJ   )   and   keep   eye   on   IP1   &   Emission   current   (   when   IP
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pressure   g oes   u p   d egasses   t he   t ip)  
Must   W ait   f or   T wo   M inute     t hen     T URN   O N   H I   V OLTAGE  
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Note:   T he   E mission   C urrent   s hould   b e   1 0µA,   i f   n ot   p ush   O N   ( ON   A DJ   )  
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3-­‐   D o   A BC   t o   a djust   b rightness   a nd   c ontrast  
 
4-­‐   G o   t o   T V   R ate   o n   S CAN   S PEED   s ection     ( F   o r   S )  
 
5-­‐   N eed   t o   D o   B eam   A lignment  
 
Go   t o   C OLUMN   A DJUSTMENT   o r   P F3   ( Key   B oard   )  
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Chose   B eam   A lign  
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Using    X  &  Y  on    STIGMA/ALIGNMENT  section,    you  need  to  get  the  image  in  
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the   c enter   o f   d isplay   m onitor   1  
Push   E XIT   (   P F   1 6   )   t o   e xit   A lignment   m ode  
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Go   t o   T V   R ate  
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6-­‐   N eed   t o   D o   A perture   A lignment  
 
Find   a   smallest   spot   on   your   speciman   to   be   able   to   work   with   10K  
-
magnification  
(use   j oystick   t o   m ove   t he   s tage)  
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<   . 5x10
  ,     I P
  < 1.5x10
-­‐7
1
2
  ,   I P
  < 6x10
 
-­‐7
-­‐6
3
 
1

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