SCS PDS 2010 Manuals

Manuals and User Guides for SCS PDS 2010. We have 1 SCS PDS 2010 manual available for free PDF download: Operator's Manual

SCS PDS 2010 Operator's Manual

SCS PDS 2010 Operator's Manual (153 pages)

Parylene Deposition System

Brand: SCS | Category: Laboratory Equipment | Size: 5.21 MB

Table of Contents

Table of Contents
5
Safety

9
- General Information
  9
- Vaporizer and Pyrolysis Section
  10
  - Pyrolysis Furnace
    10
- Dimer Loading Door
  11
- Deposition Chamber Vacuum Sensor
  11
- Inlet Baffle
  11
- Glass Viewports
  11
- Servicing
  12
- Nitrogen
  12
Overview

13
Equipment Specification

15
- Tumbler Option
  15
Installation

17
- Pds 2010 Installation Requirements
  17
- On Site Services Provided by the Customer
  17
- Shipping Damage
  17
- Unpacking
  17
- Equipment Placement
  18
- Inspection
  18
- Electrical Power Installation
  18
- CHILLER (Option)
  19
- LIQUID NITROGEN (Option)
  19
- TUMBLER (Option)
  19
- Connect and Check
  19
- ON SITE SERVICE PROVIDED by SCS CUSTOMER SERVICE (Optional)
  20
Operation

21
- Purpose of Equipment
  21
- Vacuum Concepts
  21
  - Vacuum
    21
  - Pressure
    21
  - Vacuum Levels
    22
  - Vacuum Pumps
    22
  - Gas Flow
    22
  - Outgassing
    23
  - Base Pressure
    24
  - Coating Pressure
    24
- Parylene Deposition Technology
  24
  - Parylene Types
    24
  - Parylene Deposition
    26
- Control Panel
  29
- Process Controllers
  30
  - Furnace Temperature Controller
    30
  - Chamber Gauge Temperature Controller
    30
  - Vacuum Pressure Controller
    30
  - Vaporizer Temperature Controller
    31
  - Alarm
    31
  - Furnace / Chamber Gauge Switch
    32
  - Vacuum Switch
    32
  - Vaporizer Switch
    32
- Fuses
  32
- Sequencing Computer
  33
- Cold Trap Operation
  34
  - Mechanical Chiller (Option)
    34
  - LN (Option)
    34
- Tumbler (Option) Speed Control
  35
- Base Pressure
  36
- Automatic Coating Cycle
  37
  - Dimer Boat Construction
    37
  - System Preparation
    38
  - Start-Up
    38
  - Computer Control Sequence
    38
  - End-Of-Run
    39
- Successive Runs
  40
- Semi-Automatic Operation
  40
- Operating Considerations
  41
  - Deposition Rate
    41
  - Amount of Substrate
    41
  - Type of Substrate
    41
  - Orientation of Substrate
    41
  - Pump down Time
    42
  - Vacuum System Leaks
    42
  - Baffle
    42
- Adhesion Promotion (Wet Promotion)
  42
Maintenance

45
- Parylene Deposit Removal
  45
  - Applying Release Agent
    45
  - Parylene Coating Removal
    45
  - Cold Trap Probe (Thimble)
    46
  - Vacuum Integrity
    46
  - Vacuum Pump
    46
  - Vacuum Gauge Port
    47
  - Vaporizer
    47
- Long Term Inspections and Maintenance
  47
  - Pyrolysis Tube
    47
  - O-Rings, Vacuum System Seals
    47
  - Vacuum Hose
    48
  - Rotary Feed-Thru Maintenance
    48
  - Feed-Thru Rebuild
    48
- Process Temperature Controllers
  49
- Process Controller Parameters
  53
  - To Enter the Configuration Mode
    53
  - To Exit the Configuration Mode
    53
  - To Enter the Setup Mode
    54
  - To Exit the Setup Mode
    54
  - Factory Settings
    55
  - Detailed Description of Parameters
    59
- Operation and Maintenance Logs
  63
- Supplies for Servicing
  64
- Coating Problems and Solutions
  64
Component Location & Part Numbers

67
Spare Parts

117
Step by Step Procedure for Parylene Coating

119
- Preparing to Coat
  119
- Auto Mode Operation
  122
Section 10 Limited Warranty Policy

125
Section 11 Technical Literature

127
Section 12 Electrical Schematics

129
Index

153

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