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Keithley 6517A Manuals
Manuals and User Guides for Keithley 6517A. We have
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Keithley 6517A manuals available for free PDF download: User Manual, Service Manual, Getting Started Manual
Keithley 6517A User Manual (343 pages)
Electrometer
Brand:
Keithley
| Category:
Measuring Instruments
| Size: 4.31 MB
Table of Contents
Safety Precautions
5
Table of Contents
7
List of Illustrations
14
List of Tables
17
1 General Information
19
Introduction
19
Features
19
Warranty Information
20
Manual Addenda
20
Safety Symbols and Terms
20
Specifications
20
Inspection
20
Options and Accessories
20
2 Front Panel Operation
22
Introduction
22
Power-Up
23
Line Power Connections
23
Line Fuse Replacement
23
Figure 2-1 Line Voltage Switch
23
Power-Up Sequence
24
Warm-Up Period
25
IEEE-488 Primary Address
25
Display
25
Exponent Mode (Engineering or Scientific)
25
Information Messages
25
Status and Error Messages
26
Figure 2-A Input Signal
26
Navigating Menus
29
Connections - Electrometer, High-Resistance Meter, and V-Source
30
Figure 2-6 Maximum Input Levels
31
Figure 2-10 V-Source Output
32
High-Resistance Meter Connections
32
Voltage Source Output Connections
32
Figure 2-11 Noise Shield
33
Low Noise Cables, Shielding, and Guarding
33
Figure 2-12 Guard Shield
34
Figure 2-13 Safety Shield
34
Floating Circuits
34
Figure 2-14 Floating Measurements
35
Figure 2-15 Floating V-Source
35
Test Fixtures
36
Figure 2-18 Interlock Connections
38
Voltage Measurements
39
Basic Measurement Procedure
39
Figure 2-19 Hard-Wired Interlock
39
Volts Configuration
42
Voltage Measurement Considerations
43
Figure 2-22 Meter Loading
44
Current Measurements
45
Basic Measurement Procedure
45
Amps Configuration
48
Current Measurement Considerations
49
Resistance and Resistivity Measurements
53
Resistance Measurements
54
Resistivity Measurements
57
Ohms Configuration
60
Current Measurement Considerations
63
Multiple Display
63
Ohms Measurement Considerations
63
Charge Measurements (Q)
63
Basic Measurement Procedure
64
Coulombs Configuration
64
Charge Measurement Considerations
66
Voltage Source
67
Sourcing Options
67
Setting Voltage Source Value
69
Voltage and Current Limit
70
Interlock and Test Fixtures
71
Operate
71
Analog Outputs
71
Analog Output
72
Preamp out
73
Using External Feedback
75
Electrometer Input Circuitry
75
Shielded Fixture Construction
75
Shielded Fixture Construction
76
External Feedback Procedure
76
Non-Standard Coulombs Ranges
77
Logarithmic Currents
77
Non-Decade Current Gains
78
Range and Resolution
78
Measurement Range
78
Display Resolution
78
Zero Check, Relative, and Zero Correct
79
Zero Check
79
Figure 2-45 Non-Decade Current Gains
79
Relative (REL)
80
Zero Correct
81
Test Sequences
81
Test Descriptions
81
Configure Test Sequence
89
Running the Selected Test
91
Triggers
92
Trigger Model
94
Figure 2-56 Basic Trigger Model
94
Figure 2-57 Advanced Trigger Model
95
Basic Trigger Configuration
97
External Triggering
97
Advanced Trigger Configuration
98
External Triggering
103
Figure 2-61 DUT Test System
104
Trigger Link
104
Trigger Link
105
Figure 2-63 Trigger Link Connector
106
Figure 2-64 DUT Test System
107
Figure 2-65 Trigger Link Connections (Asynchronous Example #1)
107
Figure 2-67 Connections Using Trigger Link Adapter
110
Figure 2-68 DUT Test System (Asynchronous Example #2)
110
Buffer
116
Configuring Data Storage
118
Storing and Recalling Readings
120
Filters
121
Buffer Multiple Displays
122
Filters
122
Digital Filters
123
Median Filter
123
Figure 2-75 Digital Filter; Averaging and Advanced Filter Types
124
Figure 2-76 Digital Filter; Moving and Repeating Filter Modes
125
Percent
126
Math
127
Polynomial
127
Percent
127
Percent Deviation
127
Deviation
127
Ratio
127
Logarithmic
127
Ratio
128
Logarithmic
128
Selecting and Configuring Math
128
Menu
128
Calculate Multiple Display
129
Menu
129
Savesetup
130
Savesetup
132
Communication
133
Digital Filters
134
Median Filter
134
Communication
138
Cal
139
Test
139
Test
140
Math
140
Limits
140
Figure 2-77 Limits Bar Graph Example
141
Status-Msg
142
General
142
Figure 2-79 Digital I/O Port
142
Scanning
147
Internal Scanning
147
External Scanning
147
Other Measurement Considerations
148
Ground Loops
148
Triboelectric Effects
149
Piezoelectric and Stored Charge Effects
149
Electrochemical Effects
149
Humidity
149
Light
149
Electrostatic Interference
149
Figure 2-84 Eliminating Ground Loops
149
Magnetic Fields
150
Electromagnetic Interference (EMI)
150
Relative Humidity and External Temperature Readings
150
3 IEEE-488 Reference
152
Introduction
152
IEEE-488 Bus Connections
153
Figure 3-1 IEEE-488 Connector
153
Figure 3-2 IEEE-488 Connections
153
Serial Interface Connections
154
GPIB Primary Address Selection
154
GPIB Programming Language Selection
155
Quickbasic 4.5 Programming
155
General Bus Commands
156
REN (Remote Enable)
156
IFC (Interface Clear)
156
LLO (Local Lockout)
157
GTL (Go to Local)
157
DCL (Device Clear)
157
SDC (Selective Device Clear)
157
GET (Group Execute Trigger)
157
SPE, SPD (Serial Polling)
157
Front Panel Aspects of IEEE-488 Operation
158
Error and Status Messages
158
IEEE-488 Status Indicators
158
LOCAL Key
158
Status Structure
158
Figure 3-6 Standard Event Status
160
Operation Event Status
160
Figure 3-8 Arm Event Status
161
Figure 3-9 Sequence Event Status
162
Figure 3-10 Trigger Event Status
163
Figure 3-11 Measurement Event Status
164
Condition Registers
165
Transition Filters
165
Enable Registers
166
Event Registers
166
Queues
166
Status Byte and Service Request (SRQ)
167
Trigger Model (IEEE-488 Operation)
169
Arm Layer
170
Scan Layer
170
Measure Layer
170
Trigger Model (Ieee-488 Bus Operation)
170
Programming Syntax
172
Program Messages
175
Common Commands
178
CLS - Clear Status
178
ESE <Nrf> - Event Enable
179
ESE? - Event Enable Query
179
ESR? - Event Status Register Query
180
Standard Event Enable Register
180
Standard Event Status Register
180
IDN? - Identification Query
181
OPC - Operation Complete
182
OPC? - Operation Complete Query
183
OPT? - Option Identification Query
184
RCL - Recall
184
RST - Reset the Model 6517A
184
SAV - Save the Current Setup in Memory
184
SRE <Nrf> - Service Request Enable
185
SRE? - Service Request Enable Query
185
STB? - Status Byte Query
186
Figure 3-18 Status Byte Register
186
TRG - Trigger
187
TST? - Self-Test Query
187
WAI - Wait-To-Continue
187
Signal Oriented Measurement Commands
189
Scpi Command Subsystems
192
Scpi Command Summary
193
Table 3-10 Sense Command Summary
197
Table 3-12 Status Command Summary
204
Table 3-14 Trace Command Summary
207
Table 3-16 :Tsequence Command Summary
210
Figure 2-52 Alternating Polarity Resistance/Resistivity Test
211
Calculate Subsystems
213
Calculate[1]
213
Data Commands
214
Calculate2
216
Calculate3
218
Calibration Subsystem
222
Display Subsystem
223
Main Menu
224
Format Subsystem
226
Ascii Data Format
227
Ieee754 Single Precision Data Format (32 Data Bits)
227
Elements <Item List
228
Output Subsystems
231
Route Subsystem
232
Close <List
232
OPEN <List
232
Open:all
233
SCAN Commands
233
Sense1 Subsystem
236
Function <Name
236
DATA Commands
236
Aperture <N
238
Nplcycles <N
240
Range Commands
241
Reference <N
246
Ireference <B
248
Digits <N
248
Average Commands
249
Count <N
250
Median Commands
251
Damping <B
252
Guard <B
252
Adischarge Commands
253
Xfeedback <B
253
Vscontrol <Name
253
Mselect <Name
254
Resistivity Commands
254
Source Subsystem
257
Digital Output Commands
257
V-Source Configuration Commands
257
Status Subsystem
260
Event]
260
Figure 3-22 Measurement Event Register
261
Figure 3-24 Operation Event Register
263
Figure 3-25 Trigger Event Register
264
Figure 3-26 Arm Event Register
264
Enable <Nrf
265
Figure 3-27 Sequence Event Register
265
Figure 3-28 Measurement Event Enable Register
266
Figure 3-29 Questionable Event Enable Register
266
Figure 3-30 Operation Event Enable Register
267
Figure 3-31 Trigger Event Enable Register
267
Figure 3-32 Arm Event Enable Register
267
Figure 3-33 Sequence Event Enable Register
268
Ptransition <Nrf
268
Figure 3-34 Measurement Transition Filter
269
Questionable Transition Filter
270
Operation Transition Filter
271
Figure 3-37 Trigger Transition Filter
272
Figure 3-38 Arm Transition Filter
273
Figure 3-39 Sequence Transition Filter
274
Ntransition <Nrf
275
Condition
277
Preset
277
Queue Commands
278
System Subsystem
280
Preset
280
Posetup <Name
280
Version
280
Error
280
Lsync:state <B
281
KEY <Nrf
281
Clear
282
Figure 3-40 Key-Press Codes
282
DATE <Yr>, <Mo>, <Day
283
TIME <Hr>, <Min>, <Sec
283
Tstamp Commands
283
Rnumber:reset
284
Zero Check and Zero Correct Commands
284
A/D Controls
285
Interface Commands
286
Basic Trigger Commands
286
Interlock
288
Trace Subsystem
288
Clear
288
Free
288
Points <N
289
FEED Commands
290
Data
292
Tstamp:format <Name
292
Elements <Item List
292
Trigger Subsystem
293
Initiate Commands
293
Abort
293
Immediate
293
Immediate
294
Count <N
294
Delay <N
294
Source <Name
295
Timer <N
295
Signal
296
Tconfigure Commands
296
Rtclock Commands
298
Date <Yr>, <Mo>, <Day
298
Time <Hr>, <Min>, <Sec
298
Tsequence Subsystem
299
General Test Sequence Commands
299
Start <Nrf
300
STOP <Nrf
301
STEP <Nrf
301
Mdelay <Nrf
301
Svoltage <Nrf
302
Stime <Nrf
302
Dtime <Nrf
303
Pdtime <Nrf
303
Mvoltage <Nrf
303
Mtime <Nrf
304
Hlevel <Nrf
304
Htime <Nrf
304
Llevel <Nrf
304
Ltime <Nrf
305
Count <Nrf
305
Ofsvoltage <Nrf
305
Altvoltage <Nrf
305
Readings <Nrf
305
Discard <Nrf
306
Spoints <Nrf
306
Spinterval <Nrf
306
Test Sequence Programming Example
306
UNIT Subsystem
307
Serial Interface
308
Interface Configuration
308
Operating Considerations
308
Interface Error Messages
309
Downloading Commands Using Procomm
309
DDC Programming Language
309
Voltage Source
313
Accuracy Calculations
315
A.1 Accuracy Calculations
315
Calculating Amps Accuracy
315
Calculating Ohms Accuracy
315
Calculating Volts Accuracy
315
A.1.4 Calculating Coulombs Accuracy
316
A.1.5 Calculating Resistance/Resistivity Accuracy and Repeatability Using the Alternating Polarity Method
316
B Interface Function Codes
317
Ascii Character Codes and Ieee-488 Multiline
318
Interface Command Messages
318
DIEEE-488 Bus Overview
321
Introduction
321
Bus Description
321
Bus Lines
322
Bus Commands
323
500 D IEEE-488 Bus Overview
326
Figure D-3 Command Codes
326
Table D-2 Hexadecimal and Decimal Command Codes
326
Table D-3 Typical Addressed Command Sequence
327
Table D-4 Typical Common Command Sequence
327
Table D-5 IEEE Command Groups
328
Table E-2 Coupled Commands
331
Scpi Conformance Information
334
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Keithley 6517A Service Manual (119 pages)
Electrometer
Brand:
Keithley
| Category:
Measuring Instruments
| Size: 2.85 MB
Table of Contents
Table of Contents
7
1 Performance Verification
14
Introduction
14
Environmental Conditions
14
Warm-Up Period
15
Line Power
15
Recommended Test Equipment
15
Meter Performance Verification Equipment
15
Performance Verification
15
Voltage Source Verification Equipment
16
Temperature Verification Equipment
16
Table
16
Recommended Test Equipment for Meter Performance Verification
16
Recommended Test Equipment for Voltage Source Verification
16
Humidity Verification Equipment
17
Verification Limits
17
Restoring Default Conditions
17
Table
17
Offset Voltage and Bias Current Calibration
18
Front Panel Offset Calibration
18
IEEE-488 Bus Offset Calibration
18
Meter Verification Procedures
18
DC Volts Verification
19
DC Amps Verification
19
Table
19
Limits for DC Volts Verification
19
Table
21
Reading Limits for Verification of 20Pa-2Μa Ranges
21
Coulombs Verification
22
Table
22
Limits for 20Μa-20Ma Range Verification
22
Table
23
Limits for Coulombs Verification
23
Ohms Verification
24
Table
25
Limits for Ohms Verification
25
Voltage Source Verification
27
Temperature Verification
28
Table
28
Limits for Voltage Source Verification
28
Reading Limits for Temperature Verification
28
Humidity Verification
29
Table
29
Limits for Humidity Verification
29
2 Calibration
31
Introduction
31
Environmental Conditions
32
Warm-Up Period
32
Line Power
32
Recommended Calibration Equipment
32
Table
33
Table 2-1 Recommended Calibration Equipment
33
Calibration Lock
34
Unlocking Calibration
34
IEEE-488 Bus Calibration Lock Status
34
Calibration Errors
34
Front Panel Error Reporting
34
IEEE-488 Bus Error Reporting
34
Front Panel Calibration
34
Front Panel Calibration Summary
34
Table
35
Table 2-2 Front Panel Calibration Summary
35
Front Panel Calibration Procedure
36
Figure 2-1 Calibration Unit Connections
37
Figure 2-2 Connections for DC Volts Calibration
38
Table
38
Volts Calibration Summary
38
Figure 2-3 Connections for 20Pa–2Μa Range Calibration
39
Amps Calibration Summary (20Pa-2Μa Ranges)
40
Amps Calibration Summary (20Μa-20Ma Ranges)
40
Figure 2-4 Connections for 20Μa–20Ma Range Calibration
40
Table
40
Figure 2-5 Connections for Coulombs Calibration
41
Coulombs Calibration Summary
42
Figure 2-6 Connections for Temperature Calibration
42
Table
42
Figure 2-7 Connections for Voltage Source Calibration
43
Table
43
Voltage Source Calibration Summary
43
Humidity Calibration Summary
44
Table
44
Figure 2-8 Connections for Humidity Calibration
44
IEEE-488 Bus Calibration
45
Calibration Commands
45
IEEE-488 Bus Comprehensive Calibration Procedure
45
Offset Calibration Steps
45
Table
45
IEEE-488 Bus Volts Function Calibration Summary
46
Table
46
IEEE-488 Bus Amps Calibration Summary (20Pa-2Μa Ranges)
48
IEEE-488 Bus Amps Calibration Summary (20Μa-20Ma Ranges)
48
IEEE-488 Bus Coulombs Calibration Summary
49
Table
49
IEEE-488 Bus Voltage Source Calibration Summary
50
Table
50
Single-Point Calibration
51
Front Panel Single-Point Calibration
51
IEEE-488 Bus Humidity Calibration Summary
51
IEEE-488 Bus Single-Point Calibration
52
Programming Calibration Dates
53
3 Calibration Command Reference
54
Introduction
54
Command Summary
54
Calibration Command Reference
55
IEEE-488 Bus Calibration Command Summary
55
Table
55
Table 3-1 IEEE-488 Bus Calibration Command Summary
55
Table
56
Miscellaneous Commands
58
INIT (:Calibration:protected:initiate)
58
LOCK (:Calibration:protected:lock)
58
SAVE (:Calibration:protected:save)
59
Switch? (:Calibration:protected:switch?)
59
DATE (:Calibration:protected:date)
60
NDUE (:Calibration:protected:ndue)
60
CALTEMP (:Calibration:protected:caltemp)
61
DATA? (:Calibration:protected:data?)
61
Meter Commands
62
Offset Commands
62
Volts Function Calibration Commands
63
Volts Function Calibration Commands and Parameters
63
Amps Calibration Commands
64
Amps Function Calibration Commands and Parameters (All Ranges, Without Calibration Standard)
64
Table 3-4 Amps Function Calibration Commands and Parameters (20Pa-2Μa Ranges, Using Calibration Standard)
65
Coulombs Calibration Commands
66
Coulombs Function Calibration Commands and Parameters (Without Calibration Standard)
66
Coulombs Function Calibration Commands and Parameters (Using Calibration Standard)
67
Voltage Source Calibration Commands
68
Table
68
Temperature Calibration Commands
69
Humidity Calibration Commands
69
Calibration Errors
70
Error Query Commands
70
Detecting Calibration Errors
71
Detecting Calibration Step Completion
71
Using the *OPC? Query
71
Using the *OPC Command
71
Generating an SRQ on Calibration Complete
71
4 Routine Maintenance
72
Introduction
72
Line Voltage Selection
72
Line Fuse Replacement
72
INPUT Connector Cleaning
73
Firmware Updates
73
Table 4-1 Power Line Fuse
73
5 Troubleshooting
74
Introduction
74
Repair Considerations
74
Power-On Test
75
Front Panel Tests
75
KEYS Test
75
DISPLAY PATTERNS Test
75
Character Set Test
75
Principles of Operation
75
Figure 5-1 Model 6517A Overall Block Diagram
76
Display Board
77
Power Supply
77
Figure 5-3 Power Supply Block Diagram
78
Digital Board
79
Analog Board
80
Power Supply Circuits
80
Figure 5-5 Analog Board Block Diagram
81
Circuit Board Checks
83
Display Board Checks
83
Table
83
Power Supply Checks
84
Table
84
Table 5-3 Power Supply Checks
84
Digital Board Checks
85
Analog Board Checks
86
Table 5-5 Analog Board Checks
86
6 Disassembly
88
Introduction
88
Handling and Cleaning Precautions
88
PC Board Handling
88
Solder Repairs
89
Special Handling of Static-Sensitive Devices
89
Case Cover Removal
89
PC Board Removal
89
Digital Board Removal
90
A/D Converter Board Removal
90
Analog Board Removal
90
Front Panel Disassembly
91
Main CPU Firmware Replacement
91
Instrument Re-Assembly
92
Assembly Drawings
92
7 Replaceable Parts
93
Introduction
93
Parts Lists
93
Ordering Information
93
Factory Service
93
Component Layouts
93
Model 6517A ADC Board, Parts List
95
Table
95
Table 7-1 Model 6517A ADC Board, Parts List
95
Table
96
Model 6517A Display Board, Parts List
97
Table
97
Model 6517A Analog Board, Parts List
98
Table
99
Model 6517A Digital Board, Parts List
102
Table
102
Model 6517A Mechanical Board, Parts List
104
Table
104
Model 6517A Miscellaneous Parts List
105
Calibration Messages
106
Table
107
Calibration Error Responses
107
Table B-1 Calibration Error Responses
107
Table
108
Calibration Error Query Commands
109
Calibration Constants Returned by :CAL:PROT:DATA? Query
110
Table
110
Table B-3 Calibration Constants Returned by :CAL:PROT:DATA? Query
110
Figure B-1 EERR? Query Response (Calibration Execution Errors)
111
Figure B-4 CERR? Query Response (Coulombs Function Cal Errors)
112
100 C Calibration Command Summary
113
Calibration Command Summary
113
Table
113
Table C-1 Calibration Commands
113
Calibration Commands
114
Keithley 6517A Getting Started Manual (104 pages)
Electrometer/High Resistance Meter
Brand:
Keithley
| Category:
Measuring Instruments
| Size: 1.43 MB
Table of Contents
Table of Contents
7
1 Front Panel Operation
12
Product Overview
13
Figure 1-1 Model 6517A Front Panel Overview
15
Figure 1-2 Model 6517A Rear Panel Overview
17
Display
19
Power-Up
19
Warm-Up
19
Bench Defaults
20
Changing Functions
20
Voltage Measurements
21
Figure 1-3 Voltage Measurements
22
Guarding
23
Current Measurements
23
Figure 1-4 Current Measurements
24
Resistance Measurements
25
Figure 1-5 Resistance Measurements
26
Amps Rel
27
Auto V-Source
27
Resistivity Measurements
28
Figure 1-6 Resistivity Measurements
30
Charge Measurements
31
Auto Discharge
32
External Temperature and Relative Humidity Measurements
33
Connections
33
Measurement Control
34
Temperature Units
34
Display Reading Options
35
2 Measurement Options
36
Multiple Displays
37
Menus
40
Navigating Menus
41
Table 2-5 Menu Summary
42
Voltage Source
43
Connections
43
Basic Operation
44
Configuring V-Source
45
Relative
45
Configuring Rel
45
Zero Check
46
Zero Correct
46
Triggering
47
Idle
48
Control Sources
49
Device Action
49
Output Trigger
49
Counters (Advanced Triggering)
49
Bench Default Trigger Model Setup
50
Speed
50
Configuring Speed
50
Resolution
51
Configure Resolution
51
Filter
51
Filter Types
51
Filter Modes
52
Median Filter
52
Configuring Filters
53
Buffer (Data Store)
54
Storing Readings
54
Math
55
Selecting and Configuring Math
56
Enabling Math
57
Additional Math Operations
57
Test Sequences
58
Selecting and Configuring a Test Sequence
58
Connections
59
Running a Test
60
Internal Scanning
61
Configure Internal Scanner
61
Perform the Scan
62
Close/Open Channels
63
External Scanning
63
Trigger Connections
63
Configure External Channels
64
Perform the Scan
65
3 Remote Operation
67
Overview
68
Software Support
68
Testpoint Application Software
68
Demonstration/Startup Programs
68
Labview Driver
68
IEEE-488 Bus Standards
69
RS-232 Standard
69
IEEE-488 Bus Connections
69
RS-232 Connections
70
IEEE-488 Interface, Address and Language Selection
70
RS-232 Interface Selection and Configuration
71
Common Commands
72
SCPI Commands
73
SCPI Command Syntax
74
Tree Structure
74
Long and Short Form Commands
75
Query Commands
75
Default Nodes
75
Command Syntax
76
SCPI Signal Oriented Commands
76
Fetch
76
Measure[:<Function>]
76
SCPI Subsystem Commands
77
Defaults
77
Fresh Readings
77
Function Configuration
78
V-Source
80
Data Store (Buffer)
80
Open/Close Channels and Scan
80
Trigger Model
81
Test Sequences
82
Status Register
83
Program Examples
84
Changing Function and Range
84
One-Shot Triggering
85
Continuous Triggering #1
87
Continuous Triggering #2
88
Generating SRQ on Buffer Full
89
Storing Readings in Buffer
90
Taking Readings with the Scanner Card
92
Test Sequence - Staircase Sweep
94
4 Specs and Accessories
96
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