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6487
Keithley 6487 Manuals
Manuals and User Guides for Keithley 6487. We have
3
Keithley 6487 manuals available for free PDF download: Reference Manual, User Manual
Keithley 6487 Reference Manual (338 pages)
Picoammeter/Voltage Source
Brand:
Keithley
| Category:
Measuring Instruments
| Size: 2.98 MB
Table of Contents
Safety Precautions
3
Table of Contents
5
1 Getting Started
13
Introduction
14
Overview of this Manual
14
General Information
15
Warranty Information
15
Contact Information
15
Safety Symbols and Terms
15
Unpacking and Inspection
15
Reference Manual
16
Additional References
16
Power-Up
17
Line Power Connection
17
Line Frequency
18
Power-Up Sequence
19
Front Panel Operation
20
Status and Error Messages
20
Default Settings
20
Front Panel Setup Operation
21
Remote Setup Operation
21
Menus
24
Main Menus
24
Configuration Menus
25
SCPI Programming
26
Optional Command Words
26
Query Commands
26
2 Measurement Concepts and Connections
27
Connection Fundamentals
28
Input Connector
28
Voltage Source Output Connectors
28
Maximum Input Levels
29
Low-Noise Input Cables
29
Voltage Source Test Leads
30
Basic Connections to DUT
30
Current Measurement Connections
30
Ohms Measurement Connections
31
Voltage Source Connections
32
Voltages Greater than 505V
32
Noise and Safety Shields
34
Using a Test Fixture
34
General Purpose Test Fixture
35
Model 8009 Resistivity Test Fixture
37
Floating Measurements
38
Interlock
39
Interlock Connections
39
Interlock Operation
40
Interlock Programming
40
Analog Output
40
Measurement Considerations
42
3 Measurements and Sourcing Voltage
43
Measurement Overview
44
Current Measurements
44
Voltage Source
44
Performance Considerations
45
Warm-Up Period
45
Voltage Offset Correction
45
Autozero
45
Zero Check and Zero Correct
46
Current Measurements
49
Procedure
49
Programming Example
53
Ohms Measurements
53
Overview
53
Procedure
54
SCPI Programming - Ohms Measurements
56
Programming Example - Ohms Measurements
57
Voltage Source Operation
57
Voltage Source Edit Keys
57
Configuring the Voltage Source
57
Sourcing Voltage
58
Operate Considerations
60
Compliance Indication
60
Open Interlock Indication
60
SCPI Commands - Voltage Source
61
Programming Example - Voltage
62
Alternating Voltage Ohms Mode
63
Overview
63
Storing A-V Ohms Readings
65
Recalling A-V Ohms Readings
66
Operating Considerations
67
SCPI Commands - A-V Ohms
70
Programming Example - A-V Ohms Measurements
73
4 Range, Units, Digits, Rate, and Filters
74
Range, Units, and Digits
75
Range
75
Units
76
Digits
77
SCPI Programming - Range and Digits
77
Rate
79
SCPI Programming - Rate
80
Damping
81
Filters
81
Median Filter
82
Median Filter Control
82
Digital Filter
83
SCPI Programming - Filters
85
5 Relative, MX+B, M/X+B, and Log
86
Relative
87
Setting and Controlling Relative
87
SCPI Programming - Relative
89
MX+B, M/X+B (Reciprocal), and Logarithmic
90
MX+B and M/X+B
90
Configuring and Controlling MX+B and M/X+B
90
Logarithmic
91
SCPI Programming - MX+B, M/X+B, and Log
92
6 Buffer and Sweeps
94
Buffer Operations
95
Store
95
Recall
95
Buffer Timestamps
96
Buffer Statistics
97
SCPI Programming
97
Programming Example
101
Voltage Sweeps
101
Overview
101
Sweep Operation
103
Recalling Sweep Data
103
Operating Considerations
103
Sweep Example
104
SCPI Programming - Sweeps
105
Programming Example
108
7 Triggering
109
Trigger Models
110
Idle and Initiate
112
Trigger Model Operation
113
Trigger Model Configuration - Front Panel
116
SCPI Programming
118
Programming Example
119
External Triggering
120
Input Trigger Requirements
120
Output Trigger Specifications
121
External Trigger Example
121
8 Limit Tests and Digital I/O
125
Limit Testing
126
Binning
129
Component Handler Interface
131
Component Handler Types
132
Digital Output Clear Pattern
134
Digital I/O Port
135
Sink Mode - Controlling External Devices
136
Source Mode - Logic Control
138
Setting Digital Output Lines
138
SCPI Programming - Digital Output Pattern
139
Front Panel Operation - Limit Tests
140
Limit Test Configuration
140
Performing Limit Tests
141
SCPI Programming - Limit Tests
142
Programming Example
145
9 Remote Operation
146
Selecting and Configuring an Interface
147
Interfaces
147
Languages
147
Interface Selection and Configuration Procedures
148
GPIB Operation and Reference
149
GPIB Bus Standards
149
GPIB Bus Connections
149
Primary Address
151
General IEEE-488 Bus Commands
152
Front Panel GPIB Operation
154
Programming Syntax
155
RS-232 Interface Reference
161
Sending and Receiving Data
161
RS-232 Settings
161
RS-232 Connections
163
Error Messages
164
10 Status Structure
165
Overview
166
Clearing Registers and Queues
168
Programming and Reading Registers
169
Programming Enable Registers
169
Reading Registers
170
Status Byte and Service Request (SRQ)
171
Status Byte Register
171
Service Request Enable Register
172
Serial Polling and SRQ
173
Status Byte and Service Request Commands
173
Status Register Sets
174
Register Bit Descriptions
174
Operation Event Status
176
Measurement Event Status
177
Queues
181
Output Queue
182
Error Queue
183
11 Common Commands
185
12 SCPI Signal Oriented Measurement Commands
190
13 Display, Format, and System
194
Display Subsystem
195
Format Subsystem
197
System Subsystem
202
14 SCPI Reference Tables
205
General Notes
206
15 Performance Verification
224
Introduction
225
Verification Test Requirements
225
Environmental Conditions
225
Warm-Up Period
226
Line Power
226
Recommended Test Equipment
226
Verification Limits
228
Example Reading Limits Calculation
228
Calibrator Voltage Calculations
228
Performing the Verification Test Procedures
229
Test Considerations
229
Restoring Factory Defaults
229
Offset Voltage Calibration
230
Current Measurement Accuracy
230
20Μa-20Ma Range Accuracy
230
2Na-2Μa Range Accuracy
231
Voltage Source Output Accuracy
233
16 Calibration
235
Introduction
236
Environmental Conditions
236
Temperature and Relative Humidity
236
Warm-Up Period
236
Line Power
236
Calibration Considerations
237
Calibration Cycle
237
Recommended Calibration Equipment
237
Calibration Errors
238
Calibration Menu
239
Aborting Calibration
240
Current Calculations
240
Calibration Procedure
241
Preparing for Calibration
241
Offset Voltage Calibration
241
Current Calibration
242
Voltage Source Calibration
246
Entering Calibration Dates and Saving Calibration
247
Locking out Calibration
248
Calibration Support
248
Changing the Calibration Code
248
Resetting the Calibration Code
249
Displaying Calibration Dates
249
Displaying the Calibration Count
249
17 Routine Maintenance
250
Introduction
251
Setting Line Voltage and Replacing Line Fuse
251
Front Panel Tests
252
DISP Test
253
KEY Test
253
Specifications
254
Status and Error Messages
256
Eliminating Common SCPI Errors
262
113, "Undefined Header
262
410, "Query INTERRUPTED
262
420, "Query UNTERMINATED
263
DDC Emulation Commands
264
DDC Language
265
Sweeps or A-V Ohms in DDC Mode
274
Status Words
274
Status Byte Format
276
IEEE-488 Bus Overview
279
Introduction
280
Bus Description
281
Bus Lines
282
Data Lines
283
Bus Management Lines
283
Handshake Lines
283
Bus Commands
284
Uniline Commands
287
Universal Multiline Commands
287
Addressed Multiline Commands
288
Address Commands
288
Unaddress Commands
288
Common Commands
289
SCPI Commands
289
Command Codes
289
Typical Command Sequences
290
IEEE Command Groups
291
Interface Function Codes
292
IEEE-488 and SCPI
294
Conformance Information
294
Introduction
295
GPIB 488.1 Protocol
296
Selecting the 488.1 Protocol
297
Protocol Differences
298
Message Exchange Protocol (MEP)
298
Using SCPI-Based Programs
298
NRFD Hold-Off
299
NDAC Hold-Off
299
Trigger-On-Talk
300
Message Available
300
General Operation Notes
300
SRQ When Buffer Fills with 200 Readings
301
Remote Calibration
302
Introduction
303
Calibration Commands
303
Remote Calibration Overview
304
Applications Guide
307
Measurement Considerations
308
Leakage Currents and Guarding
308
Input Bias Current
309
Voltage Burden
310
Noise and Source Impedance
311
Electrostatic Interference and Shielding
313
Making Connections
316
Typical Range Change Transients
318
Steps to Minimize Impact of Range Change Transients
322
Zero Check on / off Response
323
Applications
324
Diode Leakage Current
324
Capacitor Leakage Current
325
Measuring High Resistance
325
Alternating Voltage Ohms Measurement
326
Cable Insulation Resistance
327
Surface Insulation Resistance (SIR)
328
Photodiode Characterization Prior to Dicing
329
Focused Ion Beam Applications
331
Using Switching Systems to Measure Multiple Current Sources
332
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Keithley 6487 User Manual (115 pages)
picoammeter/voltage source
Brand:
Keithley
| Category:
Measuring Instruments
| Size: 2.07 MB
Table of Contents
Table of Contents
7
Getting Started
13
Introduction
14
Overview of this Manual
14
General Information
14
Warranty Information
14
Contact Information
15
Safety Symbols and Terms
15
Unpacking and Inspection
15
Options and Accessories
16
Additional References
19
Features
20
Model 6485 Front and Rear Panel Familiarization
20
Model 6485 Front Panel Summary
20
Figure 1-1 Model 6485 Front Panel
21
Model 6485 Rear Panel Summary
23
Analog Output
24
Display
24
Status and Error Messages
24
Model 6487 Front and Rear Panel Familiarization
25
Model 6487 Front Panel Summary
25
Model 6487 Rear Panel Summary
28
Voltage Source
29
Analog Output
30
Digital I/O
30
Display
30
Status and Error Messages
30
Power-Up
31
Line Power Connection
31
Line Frequency
31
Power-Up Sequence
32
Default Settings
33
Saving User Setups
33
Restoring Setups
33
Restoring Factory Default Setup
33
Table 1-1 Model 6485 Default Settings
34
Table 1-2 Model 6487 Default Settings
36
Menu
38
SCPI Programming
39
Optional Command Words
39
Query Commands
39
Connections
41
Connection Fundamentals
42
Model 6485 Connections
42
Model 6487 Connections
43
Figure 2-4 Model 6487 Maximum Input Levels
44
Basic Connections to DUT
45
Model 6485 DUT Connections
45
Model 6487 DUT Connections
46
Figure 2-7 Basic Model 6487 Current Measurement Connections
47
Figure 2-8 Basic Model 6487 Ohms Connections
48
Input Voltage Overload (OVRVOLT Message)
49
Using a Test Fixture
49
General Purpose Test Fixture
50
Model 8009 Resistivity Test Fixture
51
Model 6487 Interlock
52
Interlock Connections
52
Interlock Operation
52
How Is the Interlock Different between a Model 487 and Model 6487
53
Analog Output
54
Measurement Considerations
55
Table 2-1 Summary of Measurement Considerations
56
Measurements and Sourcing Voltage
57
Measurement Overview
58
Current Measurements
58
Model 6487 Voltage Source
58
Performance Considerations
59
Warm-Up Period
59
Voltage Offset Correction
59
Autozero
59
Zero Check and Zero Correct
59
Table 3-3 SCPI Commands — Zero Check and Zero Correct
60
Current Measurements
61
Precautions
61
Procedure
62
Figure 3-1 Connections for Model 6485 Current Measurements
63
SCPI Programming - Current Measurements
64
Figure 3-2 Connections for Model 6487 Current Measurements
64
Programming Example - Current Measurements
65
Model 6487 Ohms Measurements
65
Overview
65
DC and Alternating Voltage Ohms
65
Procedure
65
SCPI Programming - Ohms Measurements
67
Figure 3-3 Connections for Model 6487 Ohms Measurements
67
Programming Example - Ohms Measurements
68
Model 6487 Voltage Source Operation
68
Configuring the Voltage Source
68
Sourcing Voltage
69
Compliance Indication
69
Open Interlock Indication
70
SCPI Commands - Voltage Source
70
Programming Example - Voltage
70
Range, Units, Digits, Rate, and Filters
71
Range, Units, and Digits
72
Range
72
Units
73
Digits
73
SCPI Programming - Range and Digits
73
Rate
74
Model 6487 Damping
74
Filters
74
Median Filter
75
Digital Filter
75
Filter Control
76
Relative, MX+B, M/X+B (Reciprocal), and Log
77
Relative
78
Front Panel Relative
78
SCPI Programming - Relative
78
MX+B, M/X+B (Reciprocal), and Logarithmic
79
MX+B and M/X+B
79
Logarithmic
79
Configuring Math Functions
80
SCPI Programming - MX+B, M/X+B, and Log
80
Buffer and Sweeps
81
Buffer Operations
82
Store
82
Recall
82
Buffer Timestamp
83
Clear
83
Buffer Statistics
83
SCPI Programming - Buffer
84
Programming Example
84
Model 6487 Voltage Sweeps
85
Front Panel Sweeps
85
SCPI Programming - Sweeps
85
Programming Example
86
Remote Operation and Commands
87
Selecting and Configuring an Interface
88
Interfaces
88
Connections
88
Figure 7-1 Model 6485 IEEE-488 and RS-232 Connector Locations
89
Front Panel GPIB Operation
90
Remote Commands
90
General Bus Commands
90
Common Commands
91
Signal Oriented Commands
91
SCPI Command Subsystems
92
Programming Syntax
92
Remote Operation
97
A Specifications
99
B General Measurement Considerations
99
Measurement Considerations
100
Ground Loops
100
Triboelectric Effects
101
Piezoelectric and Stored Charge Effects
101
Electrochemical Effects
102
Humidity
102
Light
102
Electrostatic Interference
102
Magnetic Fields
103
Electromagnetic Interference (EMI
103
Example Programs
105
Programming Examples
106
1000 Readings/Second into Internal Buffer
106
900 Readings/Second to IEEE-488 Bus
107
3000 Readings into Internal Buffer
108
Keithley 6487 User Manual (105 pages)
Picoammeter/voltage source
Brand:
Keithley
| Category:
Measuring Instruments
| Size: 1.92 MB
Table of Contents
Table of Contents
8
Getting Started
16
Introduction
17
Overview of this Manual
17
General Information
17
Warranty Information
17
Contact Information
18
Safety Symbols and Terms
18
Unpacking and Inspection
18
Options and Accessories
19
User's Manual
21
Additional References
21
Features
21
Front and Rear Panel Familiarization
22
Front Panel Summary
22
Rear Panel Summary
25
Voltage Source
27
Analog Output
27
Digital I/O
27
Display
27
Status and Error Messages
27
Power-Up
28
Line Power Connection
28
Line Frequency
28
Power-Up Sequence
29
Default Settings
30
Saving User Setups
30
Restoring Setups
30
Restoring Factory Default Setup
30
Menu
33
SCPI Programming
33
Optional Command Words
34
Query Commands
34
Connections
36
Connection Fundamentals
37
Input Connector
37
Voltage Source Output Connectors
37
Maximum Input Levels
37
Connecting Cables and Test Leads
38
Basic Connections to DUT
39
Current Measurement Connections
39
Ohms Measurement Connections
39
Noise and Safety Shields
40
Using a Test Fixture
41
General Purpose Test Fixture
41
Model 8009 Resistivity Test Fixture
41
Interlock
43
Interlock Connections
43
Interlock Operation
43
Analog Output
44
Measurement Considerations
45
Measurements and Sourcing Voltage
48
Measurement Overview
49
Current Measurements
49
Voltage Source
49
Performance Considerations
50
Warm-Up Period
50
Voltage Offset Correction
50
Autozero
50
Zero Check and Zero Correct
50
Current Measurements
52
Procedure
52
SCPI Programming - Current Measurements
54
Programming Example - Current Measurements
54
Ohms Measurements
55
Overview
55
Procedure
55
SCPI Programming - Ohms Measurements
57
Programming Example - Ohms Measurements
58
Voltage Source Operation
58
Configuring the Voltage Source
58
Sourcing Voltage
59
Compliance Indication
59
Open Interlock Indication
60
SCPI Commands - Voltage Source
60
Programming Example - Voltage
60
Range, Units, Digits, Rate, and Filters
62
Range, Units, and Digits
63
Range
63
Units
64
Digits
64
SCPI Programming - Range and Digits
64
Rate
65
Damping
65
Filters
65
Median Filter
66
Digital Filter
66
Filter Control
67
Relative, MX+B, M/X+B (Reciprocal), and Log
68
Relative
69
Front Panel Relative
69
SCPI Programming - Relative
69
MX+B, M/X+B (Reciprocal), and Logarithmic
70
MX+B and M/X+B
70
Logarithmic
70
Configuring Math Functions
71
SCPI Programming - MX+B, M/X+B, and Log
71
Buffer and Sweeps
72
Buffer Operations
73
Store
73
Recall
73
Buffer Timestamp
73
Clear
74
Buffer Statistics
74
SCPI Programming - Buffer
75
Programming Example
75
Voltage Sweeps
76
Front Panel Sweeps
76
SCPI Programming - Sweeps
76
Programming Example
77
Remote Operation and Commands
78
Selecting and Configuring an Interface
79
Interfaces
79
Connections
79
Front Panel GPIB Operation
80
Remote Commands
81
General Bus Commands
81
Common Commands
81
Signal Oriented Commands
82
SCPI Command Subsystems
83
Programming Syntax
83
Specifications
86
General Measurement Considerations
88
Measurement Considerations
89
Ground Loops
89
Triboelectric Effects
90
Piezoelectric and Stored Charge Effects
90
Electrochemical Effects
91
Humidity
91
Light
91
Electrostatic Interference
91
Magnetic Fields
92
Electromagnetic Interference (EMI
92
Example Programs
94
Programming Examples
95
1000 Readings/Second into Internal Buffer
95
900 Readings/Second to IEEE-488 Bus
96
3000 Readings into Internal Buffer
97
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