Performance Data And Specifications | Sigma 300 And Sigma 300 Vp - Zeiss SIGMA Series Instruction Manual

ZEISS
9 Technical Data and Conformity
This chapter contains important technical data as well as information on the conformity.

9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP

The Microscope System must only be operated in closed rooms. It is recommended to install the
Microscope System in a dark room where artificial illumination, sunlight or other light sources
cannot interfere with image acquisition. The Microscope System should not be installed near win-
dows with direct sunlight or radiators. Compliance with the installation requirements of the Mi-
croscope System and the availability of the requested supplies is the responsibility of the customer
and has to be provided at the time of installation. Due to continuous development, we reserve the
right to change specifications without notice.
The Microscope System must be plugged into a properly installed power socket with protective
earth contact using the supplied mains cable. The protective earth connection must not be im-
paired by the use of extension cables.
Info
Your ZEISS Sales & Service Partner will provide you with the detailed installation requirements.
Weight and Sizes
Main Components
Plinth + column
Table + PC
Static damping block
Quiet mode option
Pre-vacuum pump
Electron Optics
Parameter
SEM resolution
Acceleration volt-
age
Probe current
Magnification
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
9 Technical Data and Conformity | 9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP
Description
Gemini column in high resolution configuration (max. probe current
20 nA) at optimum working distance:
§
1.0 nm at 30 kV (STEM mode)
§
1.0 nm at 15 kV
§
1.6 nm at 1 kV
Range:
Adjustment:
20 nA high resolution configuration:
100 nA high current configuration:
Probe current selection
100 nA configuration) with electromagnetic selection and precise
alignment
Optional OptiProbe
ment
Range:
mat
Length Width (mm)
(mm)
822 960
1133 1076
180 180
324 324
430 250
20 V to 30 kV
Continuously variable in 10 Volt steps
via seven apertures (six apertures in case of
module for continuous probe current adjust-
10x – 2,000,000x referenced to Polaroid 5" × 4.5" image for-
Height Weight (kg)
(mm)
1757 636
826 85
160 44
300 17.0
290 26
3 pA to 20 nA
6 pA to 100 nA
147